Lfe Ultrasonic Transducers Based On Inversion Layer Linbo3 For Medical Imaging

J. Chen,G. P. Feng,C. Zhang,Z. T. Zhang
DOI: https://doi.org/10.1109/ULTSYM.2011.0580
2011-01-01
Abstract:High frequency broadband lateral-field-excited (LFE) ultrasonic transducers were fabricated using inversion layer lithium niobate (LiNbO3) single crystal plate. The transducer developed for this study used an X-cut LiNbO3 thin plate with an active element thickness of 152 mu m relative to the designed center frequency of 33MHz. 28% inversion layer thickness ratio was obtained by grinding the half-thickness inversion layer plate instead of precision treatment control. The measured impedance showed even harmonic resonances were excited by the lateral electrodes structure in X-cut inversion layer LiNbO3 plate. From the pulse-echo response, the center frequency of the transducer was 31MHz and the bandwidth was 69%, compared to the 34% bandwidth of the LFE transducer based on non-inversion layer X-cut LiNbO3 Plate.
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