Unleashing the Power of 2D MoS 2 : In Situ TEM Study of Its Potential as Diffusion Barriers in Ru Interconnects

Ping-Hsuan Feng,Kai-Yuan Hsiao,Dun-Jie Jhan,Yu-Lin Chen,Pei Yuin Keng,Shou-Yi Chang,Ming-Yen Lu
DOI: https://doi.org/10.1021/acsami.3c10656
IF: 9.5
2023-10-05
ACS Applied Materials & Interfaces
Abstract:This study presents the utilization of MoS(2) as a diffusion barrier for metal interconnects, in situ transmission electron microscopy (TEM) observations are employed for comprehensive understanding. The diffusion-blocking ability of MoS(2) is discussed by the diffusion and phase transformation between Ru and Si via TEM diffraction and imaging. When the sample is heated to a high temperature such that MoS(2) loses the ability to block the diffusion, Si diffuses through the MoS(2) into the Ru...
materials science, multidisciplinary,nanoscience & nanotechnology
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