Abstract:Due to the atomic thickness and planar characteristics, two-dimensional (2D) materials such as graphene and transition metal dichalcogenides (TMDs) are considered to be excellent electronic materials, which endow them with great potential for future device applications. The robust and reliable application of their functional devices requires an in-depth understanding of their mechanical properties and deformation behavior, which is also of fundamental importance in nanomechanics. Considering their exceedingly small sizes and thicknesses, this is a very challenge task. In situ microscopy techniques show great superiority in this respect. This review focuses on the progress in in situ microscopy techniques (including atomic force microscopy (AFM), scanning electron microscopy (SEM), and transmission electron microscopy (TEM)) in characterizing the mechanical properties and deformation behavior of 2D materials. The technical characteristics, advantages, disadvantages, and main research fields of various in situ AFM, SEM, and TEM techniques are analyzed in detail, and the corresponding mechanical scenarios from point to plane are realized, including local indentation, planar stretching, friction sliding between atomic layers and atomic movement mechanisms. By virtue of their complementary advantages, in situ integrated microscopy techniques enable the simultaneous study of various mechanical properties, nanomechanical behavior, and inherent atomic mechanisms of 2D materials. Based on the present research, we look forward to further optimized in situ integrated microscopy techniques with high spatiotemporal atomic resolution that can reveal the dynamic structure-performance correlations and corresponding atomic mechanisms between the physical properties, such as mechanical, electrical, optical, thermal, and magnetic properties of 2D materials and their crystal structures, electronic structures, atomic layers, defect densities and other influencing factors under multifield coupling conditions. This will provide beneficial predictions and guidance for the design, construction and application of 2D material-based mechanoelectronic, piezoelectric, photoelectric, thermoelectric, etc. nanoelectronic devices.

Nanoscale Adhesion and Material Transfer at 2D MoS 2 -MoS 2 Interfaces Elucidated by In Situ Transmission Electron Microscopy and Atomistic Simulations

Natural Overlaying Behaviors Push the Limit of Planar Cyclic Deformation Performance in Few‐layer MoS2 Nanosheets

Mechanical Behaviors of MoS Nanowires under Tension from Molecular Dynamics Simulations

Delamination of MoS2/SiO2 Interfaces under Nanoindentation.

Material transfer and contact optimization in MoS2 nanotube devices

Probing the Mechanical Properties of 2D Materials via Atomic‐Force‐Microscopy‐Based Modulated Nanoindentation

In situ characterisation of nanoscale electromechanical properties of quasi-two-dimensional MoS2 and MoO3

In Situ XPS Investigation of Transformations at Crystallographically Oriented MoS2 Interfaces

Tunable friction of monolayer MoS2 by control of interfacial chemistry

Strong-coupled Hybrid Structure of Carbon Nanotube and MoS2 Monolayer with Ultrafast Interfacial Charge Transfer.

Nanoscale redox mapping at the MoS2-liquid interface

Progress in Contact, Doping and Mobility Engineering of MoS2: An Atomically Thin 2D Semiconductor

Intrinsic properties of suspended MoS2 on SiO2/Si pillar arrays for nanomechanics and optics

Low Temperature Nanoscale Electronic Transport on the MoS_2 surface

In Situ Device-Level TEM Characterization Based on Ultra-Flexible Multilayer MoS2 Micro-Cantilever

Support‐Based Transfer and Contacting of Individual Nanomaterials for In Situ Nanoscale Investigations

MoS 2 -graphene in-plane contact for high interfacial thermal conduction

Multi-terminal Transport Measurements of MoS2 Using a Van Der Waals Heterostructure Device Platform.

Nanoscale Raman Characterization of a 2D Semiconductor Lateral Heterostructure Interface

In situ microscopy techniques for characterizing the mechanical properties and deformation behavior of two-dimensional (2D) materials

Support-based transfer and contacting of individual nanomaterials for in-situ nanoscale investigations