Abstract:Although in-situ transmission electron microscopy (TEM) of nanomaterials has been gaining importance in recent years, difficulties in sample preparation have limited the number of studies on electrical properties. Here, a support-based preparation method of individual 1D and 2D materials is presented, which yields a reproducible sample transfer for electrical investigation by in-situ TEM. Using a mechanically rigid support grid allows the reproducible transfer and contacting to in-situ chips by focused ion beam with minimum damage and contamination. The transfer quality is assessed by exemplary studies of different nanomaterials, including a monolayer of WS2. Preliminary results from in-situ test experiments give an overview of possible studies, which concern the interplay between structural properties and electrical characteristics on the individual nanomaterial level as well as failure analysis under electrical current or studies of electromigration, Joule heating and related effects. The TEM measurements can be enriched by additional correlative microscopy techniques, which allow the study with a spatial resolution in the range of a few microns. Although developed for in-situ TEM, the present transfer method is also applicable to transferring nanomaterials to similar chips for performing further studies or even for using them in potential electrical/optoelectronic/sensing devices.

What problem does this paper attempt to address?

### What problems does this paper attempt to solve? This paper aims to solve the problem of difficult sample preparation in in - situ electrical property studies of nanomaterials in transmission electron microscopy (TEM). Specifically: 1. **Challenges in sample preparation**: - In past research, although in - situ TEM has become increasingly important for the study of nanomaterials, the difficulty in sample preparation has limited the number of studies on electrical properties. Traditional sample preparation methods are prone to cause sample damage and contamination, affecting the accuracy and reliability of experimental results. 2. **Study of electrical properties of individual nanomaterials**: - Researchers hope to develop a new support - substrate transfer method that can reliably transfer individual one - dimensional (1D) and two - dimensional (2D) nanomaterials to in - situ chips for the study of electrical properties. This method can reduce sample damage and contamination and ensure high - quality electrical measurements. 3. **Study of the relationship between structure and electrical properties**: - Through this new method, researchers hope to study the interaction between the structural properties and electrical properties of nanomaterials, especially at the single - nanomaterial level. In addition, related effects such as failure analysis, electromigration under current, and Joule heating can also be studied. 4. **Multi - modal imaging and spectral analysis**: - This method is not only applicable to in - situ TEM, but can also be combined with other related microscopic and spectral techniques to perform multi - modal imaging and spectral analysis on the same object, thereby obtaining more comprehensive information. ### Method overview To solve the above problems, the author proposes a transfer method based on a support substrate. The specific steps include: - Using a silicon nitride (SiNₓ) thin - film TEM grid with high mechanical strength as a support substrate. - Through focused ion beam (FIB) technology, transfer the selected nanomaterials from the support substrate to the in - situ chip with minimal damage and contamination. - During the transfer process, use microneedles and focused ion beam - induced deposition (FIBID) technology to ensure good contact between the nanomaterials and the chip. - This method allows for relevant correlative microscopy and spectral analysis, such as Raman spectroscopy, before and after the transfer. Through this method, researchers can achieve high - precision studies of the electrical properties of individual nanomaterials and explore the relationship between their structure and electrical properties.

Support-based transfer and contacting of individual nanomaterials for in-situ nanoscale investigations

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