Abstract:We developed a new platform that enables in-situ four-probe electronic measurements, in-situ three-probe field-effect measurements, nanomanipulation, and in-situ modification of nanodevices inside a transmission electron microscope (TEM). The platform includes a specially designed chip-holder and a silicon (Si) chip with suspended metal electrodes. The chip-holder can hold one Si chip with a size up to 3 mm x 3 mm and provides four electrical connections that can be connected to the micrometer-sized electrodes on the Si chip by wire-bonding. The other side of the electrical connections on the chip-holder is connected to the electronic instruments outside the TEM through a commercial Nanofactory SPM-TEM holder. The Si chip with suspended metal electrodes on one of its edges was fabricated by lithography and wet etching. Carbon nanotubes (CNTs), InAs nanowires, and tungsten disulfide nanowires were placed to stride over and connect to the suspended electrodes on the Si chip by nanomanipulations inside a scanning electron microscope (SEM). By using the platform, I-V curves of an individual single-walled CNT connecting to four electrodes were in-situ measured between any two of the four suspended electrodes, and a high-resolution TEM image of the same CNT was obtained. Furthermore, four-terminal I-V measurement on an InAs nanowire was achieved on this platform, and with a movable probe used as a gate electrode, field-effect measurement on the same InAs nanowire device was accomplished in SEM. In addition, by using the movable probe on the SPM-TEM holder, we could further in-situ modify nanomaterial and nanodevices. The present work demonstrates a method that allows a direct correlation between the atomic-level structure and the electronic property of nanomaterials or nanodevices whose structure can be further modified in-situ.

Fabrication and Electric Measurements of Nanostructures Inside Transmission Electron Microscope

In-situ Fabrication, Manipulation and Property Measurements of Single Nanotubes and Nanowires with Near Atomic Resolution

In Situ Nanomechanical Testing of Twinned Metals in a Transmission Electron Microscope

In-situ manipulating,fabricating and measuring nanostructures inside SEM

Electrical, Optical and Ionic Probe Inside Transmission Electron Microscope

In situ transmission electron microscope studies on one-dimensional nanomaterials: Manipulation, properties and applications

In Situ Tem Nanomechanics

Advances on in Situ TEM Mechanical Testing Techniques: a Retrospective and Perspective View

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.

Construction of a novel in-situ measurement system combining SEM with a STM-TEM holder

Magnetism In-Situ TEM

Fabrication of liquid cell for in situ transmission electron microscopy of electrochemical processes

Transmission Electron Microscopy of Shape-Controlled Nanocrystals and Their Assemblies

Semi-custom Methodology to Fabricate Transmission Electron Microscopy Chip for in Situ Characterization of Nanodevices and Nanomaterials

Transmission Electron Microscope As an Ultimate Tool for Nanomaterial Property Studies

In situ TEM probing properties of individual one-dimensional nanostructures

Fabrication Of Ultrafine Nanostructures With Single-Nanometre Precision In A High-Resolution Transmission Electron Microscope

Manipulation of Metallic and Semiconducting Nanowires with FETEM

In Situ Device-Level TEM Characterization Based on Ultra-Flexible Multilayer MoS2 Micro-Cantilever

Development of in Situ Optical–electrical MEMS Platform for Semiconductor Characterization

In Situ Mechanical Experiments at Atomic Lattice Resolution