In-situ manipulating,fabricating and measuring nanostructures inside SEM

CHEN Qing,WEI Xian-Long
DOI: https://doi.org/10.3969/j.issn.1000-6281.2011.06.001
2011-01-01
Abstract:In-situ measuring nanomaterials and nanostructures inside electron microscopes is one of the most important methods to understand the relationship between structure and property of nanomaterials.Furthermore,manipulating and fabricating nanomaterials and nanostructures inside electron microscopes also enable studies of new structures and new devices.Because scanning electron microscope(SEM) has large sample chamber,can easily hold multi probes and various kinds of probes for measurements and manipulations,can host multi detectors so that can characterize the same sample from different point of view,in-situ study in SEM has special applications in the study of nanomaterials and nanodevices.This review focuses on the progresses made in our laboratory in in-situ SEM in the recent years,including mainly the developments of in-situ methods of manipulation,fabrication and measurement,and the studies on the mechanical and electronic properties of carbon nanotubes.
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