Abstract:We developed a new platform that enables in-situ four-probe electronic measurements, in-situ three-probe field-effect measurements, nanomanipulation, and in-situ modification of nanodevices inside a transmission electron microscope (TEM). The platform includes a specially designed chip-holder and a silicon (Si) chip with suspended metal electrodes. The chip-holder can hold one Si chip with a size up to 3 mm x 3 mm and provides four electrical connections that can be connected to the micrometer-sized electrodes on the Si chip by wire-bonding. The other side of the electrical connections on the chip-holder is connected to the electronic instruments outside the TEM through a commercial Nanofactory SPM-TEM holder. The Si chip with suspended metal electrodes on one of its edges was fabricated by lithography and wet etching. Carbon nanotubes (CNTs), InAs nanowires, and tungsten disulfide nanowires were placed to stride over and connect to the suspended electrodes on the Si chip by nanomanipulations inside a scanning electron microscope (SEM). By using the platform, I-V curves of an individual single-walled CNT connecting to four electrodes were in-situ measured between any two of the four suspended electrodes, and a high-resolution TEM image of the same CNT was obtained. Furthermore, four-terminal I-V measurement on an InAs nanowire was achieved on this platform, and with a movable probe used as a gate electrode, field-effect measurement on the same InAs nanowire device was accomplished in SEM. In addition, by using the movable probe on the SPM-TEM holder, we could further in-situ modify nanomaterial and nanodevices. The present work demonstrates a method that allows a direct correlation between the atomic-level structure and the electronic property of nanomaterials or nanodevices whose structure can be further modified in-situ.

Electrical, Optical and Ionic Probe Inside Transmission Electron Microscope

Fabrication and Electric Measurements of Nanostructures Inside Transmission Electron Microscope

In situ TEM probing properties of individual one-dimensional nanostructures

In Situ Cathodoluminescence and Monitoring Electronic Structure Change Using Optical TEM Holder

In situ transmission electron microscope studies on one-dimensional nanomaterials: Manipulation, properties and applications

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.

Development of in Situ Optical–electrical MEMS Platform for Semiconductor Characterization

Construction of a novel in-situ measurement system combining SEM with a STM-TEM holder

Probing Electron Beam Effects with Chemoresistive Nanosensors During in Situ Environmental Transmission Electron Microscopy

In Situ Device-Level TEM Characterization Based on Ultra-Flexible Multilayer MoS2 Micro-Cantilever

Magnetism In-Situ TEM

Transmission Electron Microscopy of Shape-Controlled Nanocrystals and Their Assemblies

Development of in Situ Optical Spectroscopy with High Temporal Resolution in an Aberration-Corrected Transmission Electron Microscope.

Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution

Transmission Electron Microscope As an Ultimate Tool for Nanomaterial Property Studies

Developing Multifunctional and High Resolution In-situ TEM Holders

Progress in Dynamic in situ Electron Microscopy

In Situ Probing Mechanical Properties of Individual Tungsten Oxide Nanowires Directly Grown on Tungsten Tips Inside Transmission Electron Microscope

Recent Progress of In Situ Transmission Electron Microscopy for Energy Materials

Multi-Stimuli Operando Transmission Electron Microscopy for Two-Terminal Oxide-Based Devices

In Situ Mechanical Experiments at Atomic Lattice Resolution