Abstract:Abstract Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m s −1 in its initial 500 μ m displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation (LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.

Infrared Pulsed Picosecond Laser-Induced Plasma-Assisted Ablation of Micro-textures on Quartz Surface

Transparent superhydrophobic glass prepared by laser-induced plasma-assisted ablation on the surface

Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 Nm KrF Excimer Laser

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Achieving amorphous micro-nano superhydrophobic structures on quartz glass with a PTFE coating by laser back ablation

Study on Ablation Behaviors and Ablation Rates of a 193nm ArF Excimer Laser System for Selected Substrates in LA-ICP-MS Analysis

Fabrication of super hydrophilic surface on alumina ceramic by ultrafast laser microprocessing

Study on the ultraviolet nanosecond laser ablation and heat-affected zone of polydimethylsiloxane films based on comprehensive surface analysis

Transparent Materials Microprocessing by Nanosecond Ultraviolet Laser

Laser-induced-plasma assisted ablation and its applications

Laser Ablation of Si, Ge, Zro2 and Cu in Air

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Efficient Fabrication of Ultrasmooth and Defect-Free Quartz Glass Surface by Hydrodynamic Effect Polishing Combined with Ion Beam Figuring

Laser-Induced-Plasma-Assisted Ablation for Glass Microfabrication

Research on Removal Characteristic of the Optical Quartz with Atmospheric Pressure Plasma Jet

Etching Quartz with Inductively Coupled Plasma Etching Equipment

Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3)

Assessment Machining of Micro-Channel Textures on PCD by Laser-Induced Plasma and Ultra-Short Pulsed Laser Ablation

Wettability Modification of Zirconia by Laser Surface Texturing and Silanization

A Comparative Study of Direct Laser Ablation and Laser-Induced Plasma-Assisted Ablation on Glass Surface

Laser-induced microjet-assisted ablation for high-quality microfabrication