Abstract:Self‐organization driven by femtosecond‐laser texturing of crystalline Si in oxidation‐preventing methanol allows to create diverse anti‐reflective surface morphologies controlled by laser processing parameters. Electromagnetic processes dominating at initial steps of the progressive grating‐type morphology evolution define the onset of the hydrodynamic processes and resulting random spiky morphology upon subsequent multi‐pulse exposure. Upon systematic studies of femtosecond‐laser processing of monocrystalline Si in oxidation‐preventing methanol, it is shown that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and morphology upon subsequent multi‐pulse exposure. Under promoted exposure quasi‐regular subwavelength laser‐induced periodic surface structures (LIPSSs) are justified to evolve through the template‐assisted development of the Rayleigh‐Plateau hydrodynamic instability in the molten ridges forming quasi‐regular patterns with a supra‐wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion‐assisted morphology rearrangement resulting in a spiky surface with random orientation, yet constant inter‐structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra‐wavelength nanostructure formation, this experiments also demonstrated that resulting quasi‐regular and random spiky morphology can be tailored by the intensity/polarization distribution of incident laser beam allowing on‐demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity at visible and shortwave‐IR wavelengths. Finally, the practical attractiveness of the suggested approach for improving near‐IR photoresponse and expanding operation spectral range of vertical p‐n junction Si photodetector operating under room temperature and zero‐bias conditions via single‐step annealing‐free nanopatterning is highlighted.

Nano-ablation of Silica by Plasmonic Surface Wave at Low Fluence.

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Imaging and Controlling Ultrafast Electron Pulses Emitted from Plasmonic Nanostructures

Formation Mechanisms of Silicon Surface Structuring using Single-Multiple Nanosecond Laser Pulses in Ambient Air and Cold Plasma

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

On-demand Plasmon Nanoparticle-Embedded Laser-Induced Periodic Surface Structures (LIPSSs) on Silicon for Optical Nanosensing

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

Ultrafast Laser Manipulation of In‐Lattice Plasmonic Nanoparticles

Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

Ultrafast Laser‐Induced Plasmonic Modulation of Optical Properties of Dielectrics at High Resolution

Threshold effect on the femtosecond laser-induced periodic subwavelength structure: An analytical approach

Laser-induced Periodic Annular Surface Structures on Fused Silica Surface

Ytterbium femtosecond fiber laser ablation synthesis of silicon nanocrystals in water: Laser frequency and pulse energy dependence

Tailored engineering of crystalline surface enabled by ion-irradiation-assisted femtosecond laser ablation

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Liquid‐Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser‐Induced Periodic Surface Structures

Nanosecond laser ablation of Si(111) under an aqueous medium