Abstract:In order to comprehensively reveal the surface morphology formation mechanism during CO2 pulsed laser processing of fused silica optics, the material temperature distribution, the surface morphology evolution law, as well as the relationship between laser parameters and surface quality were analyzed through three-dimensional numerical simulation and experimental research. Results showed that the residual temperature between laser pulses was lower than material's structural transition temperature. The calculated morphologies along laser moving direction and width direction were consistent with the experimental during laser linear scanning. Besides, the superposition of spot energy during multi-pass laser scanning made the processed surface present specific three-dimensional morphology features. Laser processing lines were distributed perpendicular to the scanning direction, and the interval was equal to the track pitch. It was concluded that material's removal depth was proportional to pulse width, and inversely proportional to the track pitch and spot moving speed. The periodic ripple structures on the surface processed by 10 mu s pulsed laser were formed by the superposition of materials' residual height during laser scanning. The conical repaired site with diameter of 2 mm and angle of 12 degrees obtained by CO2 laser processing could completely eliminate surface damage, and laser-induced periodic surface structures were formed on the repaired surface. These studies could provide guidance for the optimization of CO2 laser processing technology and the improvement of processed surface quality.

Laser-induced Periodic Annular Surface Structures on Fused Silica Surface

Temporal Femtosecond Pulse Shaping Dependence of Laser-Induced Periodic Surface Structures in Fused Silica

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Formation of Laser-Induced Periodic Surface Nanometric Concentric Ring Structures on Silicon Surfaces Through Single-Spot Irradiation with Orthogonally Polarized Femtosecond Laser Double-Pulse Sequences

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse.

Generation of Periodic Surface Structures on Silica Fibre Surfaces Using 405 Nm CW Diode Lasers

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Formation Mechanism of Surface Morphology in the Process of CO2 Pulsed Laser Processing of Fused Silica Optics

Periodic surface structures on Ni–Fe film induced by a single femtosecond laser pulse with diffraction rings

Femtosecond laser induced surface structures on amorphous alloys

Femtosecond Laser-Induced Cross-Periodic Structures on A Crystalline Silicon Surface under Low Pulse Number Irradiation

Large-area Straight, Regular Periodic Surface Structures Produced on Fused Silica by the Interference of Two Femtosecond Laser Beams Through Cylindrical Lens

Laser-damage Growth Characteristics of Fused Silica under 1064- and 532-Nm Laser Irradiation

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Time-resolved Dynamics of 355-Nm Laser-Irradiated Surface Damage on Fused Silica

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Bulk Damage and Stress Behavior of Fused Silica Irradiated by Nanosecond Laser