Morphological Investigation at the Front and Rear Surfaces of Fused Silica Processed with Femtosecond Laser Pulses in Air.

ZX Wu,HB Jiang,ZH Zhang,Q Sun,H Yang,QH Gong
DOI: https://doi.org/10.1364/oe.10.001244
IF: 3.8
2002-01-01
Optics Express
Abstract:Different responses for the front (entrance) and the rear (exit) surfaces of fused silica processed with femtosecond laser pulses at 807 nm were observed under tight focusing conditions (NA = 0.4). The morphology of the surface in the beam path is highly sensitive to the focus position. By adjusting the focus position, we can produce not only a submicrometer cavity but also a submicrometer bubble. We achieved higher-quality micromachining and a better spatial resolution (400 nm) by focusing the laser beam at the rear surface rather than at the front surface.
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