Abstract:Self‐organization driven by femtosecond‐laser texturing of crystalline Si in oxidation‐preventing methanol allows to create diverse anti‐reflective surface morphologies controlled by laser processing parameters. Electromagnetic processes dominating at initial steps of the progressive grating‐type morphology evolution define the onset of the hydrodynamic processes and resulting random spiky morphology upon subsequent multi‐pulse exposure. Upon systematic studies of femtosecond‐laser processing of monocrystalline Si in oxidation‐preventing methanol, it is shown that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and morphology upon subsequent multi‐pulse exposure. Under promoted exposure quasi‐regular subwavelength laser‐induced periodic surface structures (LIPSSs) are justified to evolve through the template‐assisted development of the Rayleigh‐Plateau hydrodynamic instability in the molten ridges forming quasi‐regular patterns with a supra‐wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion‐assisted morphology rearrangement resulting in a spiky surface with random orientation, yet constant inter‐structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra‐wavelength nanostructure formation, this experiments also demonstrated that resulting quasi‐regular and random spiky morphology can be tailored by the intensity/polarization distribution of incident laser beam allowing on‐demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity at visible and shortwave‐IR wavelengths. Finally, the practical attractiveness of the suggested approach for improving near‐IR photoresponse and expanding operation spectral range of vertical p‐n junction Si photodetector operating under room temperature and zero‐bias conditions via single‐step annealing‐free nanopatterning is highlighted.

Ytterbium femtosecond fiber laser ablation synthesis of silicon nanocrystals in water: Laser frequency and pulse energy dependence

Effect of high-power nanosecond and femtosecond laser pulses on silicon nanostructures

Resonant Optical Properties of Crystalline Silicon Nanoparticles Fabricated by Laser Ablation-Based Methods

Nanosecond laser ablation of Si(111) under an aqueous medium

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

Efficiency of silicon micromachining by femtosecond laser pulses in ambient air

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Liquid‐Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser‐Induced Periodic Surface Structures

Effects of Parameters in Femtosecond Laser Micromachining on Ablation of Silicon

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Femtosecond Laser-Induced Crystallization of Amorphous Silicon Thin Films under a Thin Molybdenum Layer

Generating Silicon Nanofiber Clusters from Grinding Sludge by Millisecond Pulsed Laser Irradiation

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation

New Aspects of Femtosecond Laser Ablation of Si in Water: A Material Perspective

Surface Passivated Silicon Nanocrystals with Stable Luminescence Synthesized by Femtosecond Laser Ablation in Solution.

Femtosecond pulsed laser-induced ablation region development on the Surface of silicon

Fabrication of 4H–SiC nanoparticles using femtosecond pulsed laser ablation in deionized water

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Formation Mechanisms of Silicon Surface Structuring using Single-Multiple Nanosecond Laser Pulses in Ambient Air and Cold Plasma