Heat accumulation effect during CO2 laser processing of fused silica optics

Chao Tan,Linjie Zhao,Mingjun Chen,Jian Cheng,Yu Zhang,Jiong Zhang,Zhiyuan Yan
DOI: https://doi.org/10.1016/j.rinp.2022.105308
IF: 4.565
2022-03-01
Results in Physics
Abstract:The intrinsic heat-affected zone (HAZ) during the microsecond pulsed laser processing significantly affect the surface quality of the fused silica optics. This study employed both three-dimensional numerical simulations and experiments to analyze the heat accumulation effect, morphology evolution mechanism, and the HAZ distribution during CO2 laser processing of fused silica. Simulation results show that with the increases of process parameters such as the laser frequency, the overlap rate, and the pulse width, the residual temperature of the substrate rises gradually. The excessive laser repetition frequency mainly causes the heat accumulation and over-ablation. Analysis of the laser processed surface demonstrates that the superposition of the laser spot energy results in the periodic texture whose spatial internal is equal to the feeding distance of the laser spot. Increasing the track pitch will make the ridges and grooves of the ripple structure discrete, while reducing the laser moving speed within a certain range can improve the surface quality. Besides, the fictive temperature of the substrate tends to stabilize after the third laser pulse in each track. The thickness of the HAZ is close to the material removal depth, but it can be effectively suppressed with a pulse width less than 10 μs. Experiments are conducted to validate the simulation and the results match well with each. This study can provide a theoretical guidance for producing high-quality fused silica optics in high-power laser device applications.
physics, multidisciplinary,materials science
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