Abstract:Laser processing of polydimethylsiloxane (PDMS) plays a vital role in many applications. However, questions regarding the PDMS laser ablation mechanism still prevail. Moreover, heat-affected zone (HAZ), a critical issue in investigating and evaluating PDMS laser ablation, has been rarely studied. Here, with surface analysis techniques, such as Raman spectroscopy, atomic force microscopy (AFM), micro-infrared spectroscopy (micro-IR), the ultraviolet nanosecond (UV-ns, 355 nm) laser ablation and HAZ of PDMS films were investigated. Due to the poor absorption of PDMS and the insufficient laser photon energy, the UV-ns laser ablation of PDMS was primarily a photothermal process. The chemical composition of the PDMS film surface changed due to the incomplete decomposition of PDMS and the deposition of decomposition products, leading to Young's modulus of the PDMS film surface increasing from 3.81 MPa to 9.70 MPa. Micro-cracks and micro-wrinkles emerged on the PDMS film surface due to laser-induced thermal stress. For the multi-pulse UV-ns laser ablation of PDMS, the ablation threshold fluence decreased rapidly from 7.15 J/cm 2 to 1.46 J/cm 2 as the number of pulses increased from 5 to 100 due to the incubation effect. Moreover, the laser-induced photothermal effects resulted in the formation of HAZ, where the chemical composition changed. Laser-affected zone (LAZ) was proposed to investigate the relationships between HAZ and laser single-pulse energy and the number of laser pulses. With the above surface analysis, an effective method of studying the PDMS laser ablation and evaluating HAZ was developed.

Study on the ultraviolet nanosecond laser ablation and heat-affected zone of polydimethylsiloxane films based on comprehensive surface analysis

Fs-Laser Processing of Polydimethylsiloxane

Fs-Laser Processing of Medical Grade Polydimethylsiloxane (Pdms)

Precision cutting of PDMS film with UV-nanosecond laser based on heat generation-diffusion regulation

Modification and activation of the surface of medical-grade PDMS after irradiation by ultrashort laser pulses

Laser induced surface modification of polydimethylsiloxane as a super-hydrophobic material

Effects of Ambient Temperature on Nanosecond Laser Micro-Drilling of Polydimethylsiloxane (PDMS)

Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser

Infrared Pulsed Picosecond Laser-Induced Plasma-Assisted Ablation of Micro-textures on Quartz Surface

Femtosecond Laser Induced Microripple on Pdms Surface

Laser ablation behavior and mechanism of polyimide by UV irradiation

Heat accumulation effect during CO2 laser processing of fused silica optics

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation

High-repetition-rate Femtosecond Laser Micromachining of Poly(methyl Methacrylate)

Micro-Swelling and penetration assisted laser Processing: A doping and laser processing method for polydimethylsiloxane films based on swelling and penetration behavior

Temperature Field-Assisted Ultraviolet Nanosecond Pulse Laser Processing of Polyethylene Terephthalate (PET) Film

fs- and ns-laser processing of polydimethylsiloxane (PDMS) elastomer: Comparative study

Effect of polymer addition and temperature on the structure of silicon-based polymer films deposited by excimer laser ablation of hexaphenyldisilane

Excimer Laser Dry Etching of PDMS Applied for Microfluidic Chips

Roles of chemistry modification for surface wettability of Polyether-Ether-Ketone (PEEK) by ultraviolet laser ablation