Abstract:Laser processing of polydimethylsiloxane (PDMS) plays a vital role in many applications. However, questions regarding the PDMS laser ablation mechanism still prevail. Moreover, heat-affected zone (HAZ), a critical issue in investigating and evaluating PDMS laser ablation, has been rarely studied. Here, with surface analysis techniques, such as Raman spectroscopy, atomic force microscopy (AFM), micro-infrared spectroscopy (micro-IR), the ultraviolet nanosecond (UV-ns, 355 nm) laser ablation and HAZ of PDMS films were investigated. Due to the poor absorption of PDMS and the insufficient laser photon energy, the UV-ns laser ablation of PDMS was primarily a photothermal process. The chemical composition of the PDMS film surface changed due to the incomplete decomposition of PDMS and the deposition of decomposition products, leading to Young's modulus of the PDMS film surface increasing from 3.81 MPa to 9.70 MPa. Micro-cracks and micro-wrinkles emerged on the PDMS film surface due to laser-induced thermal stress. For the multi-pulse UV-ns laser ablation of PDMS, the ablation threshold fluence decreased rapidly from 7.15 J/cm 2 to 1.46 J/cm 2 as the number of pulses increased from 5 to 100 due to the incubation effect. Moreover, the laser-induced photothermal effects resulted in the formation of HAZ, where the chemical composition changed. Laser-affected zone (LAZ) was proposed to investigate the relationships between HAZ and laser single-pulse energy and the number of laser pulses. With the above surface analysis, an effective method of studying the PDMS laser ablation and evaluating HAZ was developed.

Effect of polymer addition and temperature on the structure of silicon-based polymer films deposited by excimer laser ablation of hexaphenyldisilane

Synthesis of Silicon-Based Polymerized Films by Excimer Laser Ablation Deposition of Hexaphenyldisilane

Effect of Target Modification on Deposition Rates of Hexaphenyldisilane by Laser Ablation

Selected Two-Dimensional Effects in Gas Immersion Laser Doping of Unpatterned Silicon

Thickness-dependent Molecular Chain and Lamellar Crystal Orientation in Ultrathin Poly(di-N-hexylsilane) Films.

Study on the ultraviolet nanosecond laser ablation and heat-affected zone of polydimethylsiloxane films based on comprehensive surface analysis

Influence of Substrate Temperature on the Molecular Structure of Pmma Films Deposited by Pulsed Laser Deposition

Characteristics of laser-densified and conventionally heat treated sol–gel derived silica–titania films

Influence of Substrate Temperature on the Microstructure and Optical Properties of Hydrogenated Silicon Thin Film Prepared with Pure Silane

Effect of Added Homopolymer on Structures of Thin Films of PS-b-PDMS/PS Mixture under Solvent Vapor Annealing

Varied Longitudinal Microstructure of Μc-Si: H Films by Tuning Substrate Temperature

Regulation of the Properties of Polymer-Dispersed Liquid Crystals Via the Introduction of Silicon-Based Materials

Melting and Resolidification Dynamics of A-Si and Poly-Si Thin Films During Excimer Laser Annealing

In Situ and Ex Situ Diagnostics on Melting and Resolidification Dynamics of Amorphous and Polycrystalline Silicon Thin Films During Excimer Laser Annealing

The Effect of Etchant Composition on Film Structure During Laser-Assisted Porous Si Growth

The Regulation of Electro-Optical Properties and Polymer Morphology of Polymer-Dispersed Liquid Crystal Films with Silicon Nanostructure

High-Quality Poly-Si Crystallization Technology Based on Laser-Induced Melting and Resolidification Dynamics of Si Thin Films.

Single Shot Excimer Laser Crystallization of Silicon Films Deposited by LPCVD

Molecular Dynamics Study about the Effect of Substrate Temperature on A-Si:H Structure

Combined use of methacrylate/epoxy functionalized silanes for tuning of hyperbranched polysiloxane structure

Excimer Laser-Induced Temperature Field in Melting and Resolidification of Silicon Thin Films