Influence of Substrate Temperature on the Molecular Structure of Pmma Films Deposited by Pulsed Laser Deposition

Liang Chen,Yidong Xia,Xiaoping Huang,Xuefei Liang,Jiang Yin,Zhiguo Liu
DOI: https://doi.org/10.1088/0022-3727/40/12/014
2007-01-01
Abstract:Poly-methyl-methacrylate (PMMA) films were prepared by pulsed laser deposition on a Si (100) substrate at different temperatures. The films were characterized by using Fourier transform infrared spectrum, x-ray photoelectron spectroscopy, scanning electron microscope (SEM) and atomic force microscope. It was observed that the molecular structure of the PMMA films transformed from isotactic to syndiotactic during ablation and subsequent deposition. However, the deposition process does not significantly alter the monomer composition of the polymer films, as compared with the PMMA target. The substrate temperature shows great effects on the surface morphology and the leakage current of the PMMA films. It is expected that the PMMA films with flat surface and optimum chemical stability might provide some applications in a microelectronic device.
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