Properties of gas source molecular beam epitaxy grown wavelength extended InGaAs photodetector structures on a linear graded InAlAs buffer

Yong-Gang Zhang,Yi Gu,Kai Wang,Ai-zhen Li,Cheng Li
DOI: https://doi.org/10.1088/0268-1242/23/12/125029
IF: 2.048
2008-11-07
Semiconductor Science and Technology
Abstract:The properties of gas source molecular beam epitaxy grown wavelength extended (2.4 µm) InGaAs photodetector structures on a linear graded InAlAs buffer with different grading rates have been investigated by means of XRD and PL techniques in conjunction with optical and atomic force microscopy. Results show that full relaxation and favorable optical characteristics of the active layers only occur for the wafers with a mismatch grading rate of about 1.2% µm−1 or lower, whereas moderate morphology and structural quality could be achieved for a mismatch grading rate up to 2.4% µm−1. A thin GSMBE grown linear graded InAlAs buffer layer of 1.4 µm is sufficient to relax the strain of an InGaAs layer with 1.7% mismatch to the InP substrate and reach a good quality of the wafer. The relaxation mechanisms of the buffer at different grading rates were also discussed.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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