Effects of buffer doping on the strain relaxation of metamorphic InGaAs photodetector structures

Yi Gu,Weiguo Huang,Yage Liu,Yingjie Ma,Jian Zhang,Qian Gong,Yonggang Zhang,Xiumei Shao,Xue Li,Haimei Gong
DOI: https://doi.org/10.1016/j.mssp.2020.105281
IF: 4.1
2020-12-01
Materials Science in Semiconductor Processing
Abstract:<p>The strain relaxation behaviors of metamorphic In<sub>0.83</sub>Ga<sub>0.17</sub>As photodetector structures on Si-doped, Be-doped and undoped In<sub>x</sub>Al<sub>1-x</sub>As graded buffers are investigated. The cross-hatch period and surface roughness are increased by doping in buffer layers. X-ray diffraction reciprocal space mapping measurements reveal that the doping of Si and Be induces the increase of misfit dislocation density along [1−10] and [110] directions, respectively. The photoluminescence intensity of In<sub>0.83</sub>Ga<sub>0.17</sub>As photodetector structures is deteriorated by the doping in In<sub>x</sub>Al<sub>1-x</sub>As buffers. The dark currents of fabricated photodetector chips are characterized and the In<sub>0.83</sub>Ga<sub>0.17</sub>As photodetector on undoped InAlAs buffer shows the lowest dark currents. The Si doping shows more detrimental effects on photoluminescence and dark current performances than Be doping due to the enhanced growth roughness. These results indicate that the doping of buffer layers is critical for the design and fabrication of metamorphic optoelectronic devices.</p>
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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