Determination of trace amounts of copper in titanium dichloride molten salt by tungsten furnace AAS after solvent extraction.

Takeshi OBATA,Yoshio KOBAYASHI,Satoshi KAWADA

DOI: https://doi.org/10.2116/bunsekikagaku.42.11_747

1993-01-01

BUNSEKI KAGAKU

Abstract:High-purity titanium disilicide is a useful material as the electrode of very large-scale integrated circuits owing to its very low electrical resistivity. To produce high-purity titanium disilicide, it is necessary to develop a highly sensitive analytical method for copper in the titanium dichloride molten salt, which is an intermediate product of the process. Samples were decomposed in nitric acid, evaporated to dryness and dissolved with hydrofluoric acid. After the addition of the Zn-ethylphenyldithiocarbamate, copper could be extracted into 4-methyl-2-pentanone. The organic phase was heated to dryness and decomposed with nitric acid. After the addition of 6 M hydrochloric acid, it was again evaporated to dryness. After the salt was dissolved in 5 ml of 1 M hydrochloric acid, the copper in the solution was determined by the tungsten furnace AAS method. The lower limit of determination is 0.01 ppm for copper.

chemistry, analytical