P‐10.14: A Nanoscale Composite Substrate for Improving Micro‐LED Emission Efficiency and Reducing Lift‐off Damage
H.D. Zhang,Z.Z. Chen,Y.Y. Chen,J.X. Nie,Z.J. Pan,C.H. Deng,B.Y. Dong,X. Xin,W.H. Chen,X.N. Kang,Z.W. Liang,Q. Wang,G.Y. Zhang,B. Shen
DOI: https://doi.org/10.1002/sdtp.16425
2023-01-01
SID Symposium Digest of Technical Papers
Abstract:SID Symposium Digest of Technical PapersVolume 54, Issue S1 p. 828-828 Poster Session: P-10: Micro-LED P-10.14: A Nanoscale Composite Substrate for Improving Micro-LED Emission Efficiency and Reducing lift-off Damage H.D. Zhang, H.D. Zhang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.Z. Chen, Z.Z. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808 Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, China, 226000Search for more papers by this authorY.Y. Chen, Y.Y. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorJ.X. Nie, J.X. Nie State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.J. Pan, Z.J. Pan State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorC.H. Deng, C.H. Deng State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorB.Y. Dong, B.Y. Dong State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorX. Xin, X. Xin State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorW.H. Chen, W.H. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorX.N. Kang, X.N. Kang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.W. Liang, Z.W. Liang Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorQ. Wang, Q. Wang Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorG.Y. Zhang, G.Y. Zhang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorB. Shen, B. Shen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, China, 226000Search for more papers by this author H.D. Zhang, H.D. Zhang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.Z. Chen, Z.Z. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808 Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, China, 226000Search for more papers by this authorY.Y. Chen, Y.Y. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorJ.X. Nie, J.X. Nie State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.J. Pan, Z.J. Pan State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorC.H. Deng, C.H. Deng State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorB.Y. Dong, B.Y. Dong State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorX. Xin, X. Xin State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorW.H. Chen, W.H. Chen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorX.N. Kang, X.N. Kang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871Search for more papers by this authorZ.W. Liang, Z.W. Liang Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorQ. Wang, Q. Wang Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorG.Y. Zhang, G.Y. Zhang State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Dongguan Institute of Optoelectronics, Peking University, Dongguan, Guangdong, China, 523808Search for more papers by this authorB. Shen, B. Shen State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, China, 100871 Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, China, 226000Search for more papers by this author First published: 03 August 2023 https://doi.org/10.1002/sdtp.16425AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. References 1 Kelly, M.K., et al., Laser-Processing for Patterned and Free-Standing Nitride Films. MRS Online Proceedings Library, 1997. 482(1): p. 969-974. 2 Tian, W., et al., Mechanisms and Performance Analysis of GaN-Based Micro-LED Grown on Pattern Sapphire Substrate by Laser Lift-Off Process. ECS journal of solid state science and technology, 2022. 11(4): p. 46001. 3 Chen, Y., et al., A study of GaN nucleation and coalescence in the initial growth stages on nanoscale patterned sapphire substrates via MOCVD. CrystEngComm, 2018. 2(42): p. 6811-682. 4 Horng, R., et al., Chemical lift-off process for nitride LEDs from an Eco-GaN template using an AlN/strip-patterned-SiO2 sacrificial layer. physica status solidi (a), 2017. 214(3): p. 1600657. Volume54, IssueS1International Conference on Display Technology 2023 (Volume 54, Issue S1)April 2023Pages 828-828 ReferencesRelatedInformation