Enhancement of Extraction Efficiency in Laser-debonded GaN Light Emitting Diodes

C. P. Chan,T. M. Yue,C. Surya,A. M. C. Ng,A. B. Djurisic,F. Scholz,C. K. Liu,M. Li
DOI: https://doi.org/10.1109/edssc.2005.1635312
2005-01-01
Abstract:We conducted detailed investigations of laser-assisted debonding of GaN-based light emitting diodes (LEDs). The devices were grown by metalorganic chemical vapor deposition (MOCVD) on sapphire substrates. After laser debonding the devices were photo-electrochemically (PEC) etched for the roughening of the debonded surface. The dependence of the luminous intensity of the LEDs as a function of the surface roughness was investigated in detailed. A 60% increase in the luminous intensity was observed. This increase is attributed to the enhancement in photon extraction efficiency.
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