GaN-based LEDs with a High Light Extraction Composite Surface Structure Fabricated by a Modified YAG Laser Lift-off Technology and the Patterned Sapphire Substrates

Yongjian Sun,Simeon Trieu,Tongjun Yu,Zhizhong Chen,Shengli Qi,Pengfei Tian,Junjing Deng,Xiaoming Jin,Guoyi Zhang
DOI: https://doi.org/10.1088/0268-1242/26/8/085008
IF: 2.048
2011-01-01
Semiconductor Science and Technology
Abstract:Vertical structure LEDs have been fabricated with a novel light extraction composite surface structure composed of a micron grating and nano-structure. The composite surface structure was generated by using a modified YAG laser lift-off technique, separating the wafers from cone-shaped patterned sapphire substrates. LEDs thus fabricated showed the light output power increase about 1.7–2.5 times when compared with conventional vertical structure LEDs grown on plane sapphire substrates. A three-dimensional finite difference time domain method was used to simulate this new kind of LED device. It was determined that nano-structures in composite surface patterns play a key role in the improvement of light extraction efficiency of LEDs.
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