Improved Uniformity and Excellent Endurance Characteristics of TaOx-Based RRAM by Laser-Mediated Interface Engineering

Lindong Wu,Qishen Wang,Hongxu Liao,Chaoyi Ban,Linbo Shan,Zongwei Wang,Yuan Wang,Yimao Cai
DOI: https://doi.org/10.1109/snw63608.2024.10639217
2024-01-01
Abstract:In this work, we report a laser-mediated interface engineering method to improve RRAM performances. Compared with pristine TiN/TaO x /TaN devices, a 10x uniformity improvement is achieved when a 0.4 J/cm 2 laser is applied to irradiate the TaO x layer. Moreover, an excellent endurance (10 6 ) with high on/off ratio (156) is obtained. The characterization results show that laser treatment can effectively inhibit oxygen exchange at the interface between TaO x layer and TiN electrode to improve controllability of the filament. Our study shows the potential of laser-mediated interface engineering for achieving high-performance RRAMs.
What problem does this paper attempt to address?