Insights into the Origin of Robust Ferroelectricity in HfO2 -Based Thin Films from the Order-Disorder Transition Driven by Vacancies

Chenxi Yu,Haili Ma,Mingqiang Li,Fei Liu,Xiangxiang Ding,Yudi Zhao,Haolin Li,Xujin Song,Fachen Liu,Wanwang Yang,Jun Xu,Jingmin Zhang,Xiaorui Hao,Lifeng Liu,Peng Huang,Peng Gao,Jinfeng Kang
DOI: https://doi.org/10.1103/physrevapplied.22.024028
IF: 4.6
2024-01-01
Physical Review Applied
Abstract:HfO2-based 2-based ferroelectrics (FE-HfO2) 2 ) have triggered extensive research interest because they are promising materials for beyond-Moore electronic device applications. However, the origin of ferroelectricity in HfO2-based 2-based ferroelectrics remains elusive. Here, we demonstrate that the ordered oxygen vacancies (VO) O ) in FE-HfO2 2 thin films contribute to ferroelectricity through the formation of a stable-polar phase. In FE-HfO2 2 thin films, oxygen vacancy (VO) O ) defects induce local electric dipoles and the ordered VO O distribution results in the stable-polar phases. Using first-principles calculations, a thermodynamically stable-polar phase M 1 with the spontaneous polarization of 27 mu C/cm2 2 is predicted in monocliniclike Hf4Zr4O15 4 Zr 4 O 15 structures. Moreover, the predicted M 1 structures are directly visualized in Hf 0.5 Zr 0.5 O 2-delta (HZO) ferroelectric thin films using spherical aberration (Cs) Cs )-corrected scanning transmission electron microscopy. The proposed mechanism for VO-induced O-induced order-disorder ferroelectricity in FE-HfO2 2 opens a new pathway to explore the underlying physics of the ferroelectric characteristics in FE-HfO2. 2 .
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