Abstract:To realize the 3D profilometry,a four-step phase shifting method integrated with fringes projection was adopted.In the fringe-projection profilometry,a computer-simulated fringe patterns was projected on the free-form surface of object and the fringes were captured by the phase-shifting technique.Automatic image-processing software with the proposed DCT-based phase-reconstructing algorithm was developed to reconstruct the continuous phase map from fringe patterns.The final 3D profile of object was obtained from the phase map.The corresponding experiments were conducted independently.In interferometry,a new-type interferometer was proposed,which combined the radial shear interferometer with simultaneous phase-shifting technique.It was based on the optical path with two Jamin glass plates and realized the collection of four frames of fringe patterns according to the principle of polarized light.It can test the full-field surface with different sizes and be free from vibration.The theoretical accuracy of this interferometer can reach 1/100 wavelength.Because it enjoys high anti-Jamming performance,the proposed interferometer can realize the high-precision dynamic measurement of aspheric surface under the common conditions without any vibration-isolated setup.

Measurement and Analysis of Surface Profiles by Optical Scattering Method

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Research on Two Optical Methods for Aspheric Measurement

Study of Soft X-ray Grazing Incidence Optical Scattering Phenomena

A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Light-Scattering Method for Characterizing Optical-Surfaces

Surface Form Metrology of Micro-Optics

Reconstruction of a heterogeneous fractal surface profile from scattering measurements at low grazing incidence

Reconstruction Of Roughness Profile Of Fractal Surface From Scattering Measurement At Grazing Incidence

Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method

Modeling and Simulation of an Optical System for Surface Roughness Measurement

Modeling of optical scattering from topographic surface measurements of high-quality mirrors

Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope

The Modelling and Simulation of a Rough Surface

Method of In-Process Measurement of Wafer Surface Quality Based on Laser Scattering Principle

Wavefront Sensing and Surface Shape Measurement Based on Microfocus X-Ray Grating Interferometer

Study on Optical Surface Roughness with Multi-fractal Spectrum

Measurement of Random Surface Parameters of Weak Scatterers Using the Speckle Contrast Method

Light Scattering For Testing Roughness Of Formed Surfwees

Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry

Speckle Intensity Correlation in the Diffraction Region Near Rough Surfaces and Simulational Experiments for Extraction of Surface Parameters