Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method

Dun Weitao,Luo Hongxin,Song Li,Wang Jie,W. Yuzhu,Zhang Yifei
Abstract:In this work,surface roughness of two large-size super-smooth mirrors,of 210 and 320 mm in length, was studied by grazing incidence X-ray scattering method(GIXRS).A two-dimensional theoretical model was derived based on Tong's result in 1993,so as to the correlate power spectrum density(PSD) of a mirror surface to the intensity distribution of X-ray scattering.The two mirrors were measured on Beamline 16B at Shanghai Synchrotron Radiation Facility and the data were analyzed.The results showed that the root mean square of the surface roughness calculated using the model agreed well with that measured by a white-light 3D profiler.
Physics,Materials Science
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