Study on Optical Surface Roughness with Multi-fractal Spectrum

Shu-yi GAN,Qing ZHOU,Xiang-dong XU,Yi-lin HONG,Ying LIU,Shao-jun FU
DOI: https://doi.org/10.3969/j.issn.1000-1158.2010.05.11
2010-01-01
Abstract:Multi-fractal method is used to evaluate optical surface roughness which varies greatly with the sampling position and size if evaluated by other commonly used parameters such as mean roughness (Ra), root mean square roughness (Rq) or power spectrum density (PSD). Based on the atomic force microscope (AFM) images, their partition function and multi-fractal spectrum are calculated. The calculation indicates that the multi-fractal spectra of different samples with the same sampling size deffer significantly from each other. The curves of the partition function from the same sample with different sampling size and position are different, but their spectra are quite similar. The relations between the spectra shape and surface roughness are discussed. A suggestion is given about how to measure a surface roughness with the result of the calculation.
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