Study of Soft X-ray Grazing Incidence Optical Scattering Phenomena

Bin Chen
2006-01-01
Laser & Optoelectronics Progress
Abstract:A linear system treatment of short-wavelength surface scattering theory is introduced, based on which, features of soft X-ray grazing incidence optical scattering are investigated when the wavelength and the grazing angle is different. It is discovered that the scattering increases as the grazing angle increases or the wavelength decreases.
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