Abstract:The Whispering Gallery Modes Resonators(WGMR) are specific electromagnetic modes confined in circular resonators, where light beams are guided along the circumferences of the resonators with very small losses by total internal reflections. WGMR is the core component of optical filters, ultra-narrow linewidth laser, microwave photoelectric oscillator, optical frequency comb, rubidium atomic clock etc and high-precision sensors. Q factor is defined as the ratio of the total energy of photons in WGMR to the loss lost in one propagation cycle. The energy loss of WGMR is discussed. The cutting dynamics model diagram was established based the cutting force model for turning. The key technology affecting WGMR’s Q factor was the fabrication process. The manufacture of ultra-high Q factor WGMR are realized through rough machining, ultra-precision turning and precision polishing. The processing of ultra-precision turning and precision polishing is reported in the paper. The important fabrication processing of WGMR is ultra-precision turning. The test results show that the Q value of WGMR is 1.5×10 9@1550nm by Q value measurement system. The surface roughness and shape error of WGMR are 0.6nm (Ra value) and 5.3nm (PV value) respectively, measured by white light interferometer.

Fabrication of an Ultra-High Quality MgF2 Micro-Resonator for a Single Soliton Comb Generation.

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Ultrahigh-Q crystalline microresonator fabrication with only precision machining

Fabrication of Millimeter-Scale Crystal Whispering Gallery Mode Resonators

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

Fabrication And Packaging For High-Q Caf2 Crystalline Resonators With Modal Modification

Mid-infrared Broadband Optical Frequency Comb Generated in MgF2 Resonators

Perfect Soliton Crystals in the High-Q Microrod Resonator

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Fabrication of High-Q Suspended AlGaAs Microresonators for Efficient Kerr Comb Generation

Micro Hemispherical Resonators with Quality Factor of 1.18 Million Fabricated Via Laser Ablation

Ultrafast Laser in Fabrication of Micro Hemispherical Resonators with Quality Factor over Millions

High-Q Silicon Microsphere Whispering Gallery Mode Resonator Fabricated by Laser Induced In-Fiber Capillary Instability

Fabrication of a microtoroidal resonator with picometer precise resonant wavelength.