Analog and Logic Circuits Fabricated on a Wafer-Scale Two-Dimensional Semiconductor

Xinyu Wang,Xinyu Chen,Jingyi Ma,Honglei Chen,Saifei Gou,Xiaojiao Guo,Ling Tong,Yin Xia,Zihan Xu,Peng Zhou,Chenjian Wu,Wenzhong Bao
DOI: https://doi.org/10.1109/vlsi-tsa54299.2022.9770978
2022-01-01
Abstract:MoS2 is a typical two-dimensional (2D) semiconductor with extraordinary electrical properties, and has been intensively investigated as a channel material for field-effect transistors (FETs) and logic circuits in recent years. In this work, the top gated (TG) MoS2 FETs are fabricated with wafer-scale uniformity, and several pivotal devices and circuits based on MoS2 films are demonstrated, including current mirrors, inverter, and the AND/OR logic circuits. All devices exhibit reliable electrical characteristics, which lays the foundation for the future fabrication of large-scale MoS2 circuits.
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