High-Performance CVD MoS2 Transistors with Self-Aligned Top-Gate and Bi Contact

Weisheng Li,Dongxu Fan,Liangwei Shao,Futao Huang,Lei Liang,Taotao Li,Yifei Xu,Xuecou Tu,Peng Wang,Zhihao Yu,Yi Shi,Hao Qiu,Xinran Wang
DOI: https://doi.org/10.1109/iedm19574.2021.9720595
2021-01-01
Abstract:We fabricated high-performance MoS2 FETs featuring large-area CVD MoS2 channel, self-aligned top-gate, and semi-metallic Bi Ohmic contact. For the first time, semi-metallic Bi was used in the top-gate 2D FET as source/drain contacts to achieve zero Schottky barrier and reduce contact resistance ($R_{\mathrm{C}}$). The devices showed $I_{\text{ON}}$ of $680\ \mu \mathrm{A}/\mu \mathrm{m}$ at 60 nm gate length ($L_{\mathrm{g}}$) and $R_{\mathrm{C}}$ of $280\ \Omega\cdot\mu \mathrm{m}$, which are the best reported values among top-gate 2D FETs. It is predicted that, by scaling down the gate length to sub-10 nm technology nodes, our proposed top-gate MoS2 FET technology will meet the requirement of the IRDS 2028 targets of logic transistors.
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