Low Polarization-Dependent-loss Silicon Photonic Trident Edge Coupler Fabricated by 248 Nm Optical Lithography

Xin Tu,Patrick Dumais,Ming Li,Dominic Goodwill,Hongyan Fu,Dongyu Geng,Eric Bernier
DOI: https://doi.org/10.1364/acpc.2015.as4b.3
2015-01-01
Abstract:Trident edge couplers were fabricated using optical lithography. TE and TM coupling loss with lensed fiber were improved by 0.2 dB and 0.3 dB compared to a single-taper coupler. PDL was improved by 0.1 dB.
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