Cmos-Compatible High Efficiency Polarization Splitting Grating Coupler Near 1310Nm

Weike Wu,Tianhua Lin,Tao Chu,Hua Zhang
DOI: https://doi.org/10.1364/acpc.2016.as2f.4
2016-01-01
Abstract:Polarization-splitting grating couplers (PSGCs) were fabricated by the complementary metal-oxide semiconductor process at 1310 nm on silicon-on-insulator. The PSGC achieved a maximum coupling efficiency of -3.3 dB using compensation design.
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