Ltra-Compact Silicon Photonic Edge Coupler Based On Subwavelength Gratings

Xin Mu,Sailong Wu,Lirong Chong,Xin Tu,H. Y. Fu

2019-01-01

Abstract:Wc present an ultra -compact fork -shape cdgc coupler based on subwavelength gratings stnicture. This cdgc coupler achieves a high efficiency of 77% with only 36.5 mm in length, exhibiting stable bandwidth feature and large fabrication tolerance.

What problem does this paper attempt to address?

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

Yunfei Fu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu,Qingbo Li

DOI: https://doi.org/10.1364/iont.2012.if2a.6

2012-01-01

Abstract:CMOS-compatible broad-band and efficient edge couplers are presented in this paper. The couplers are based on SiON ridge waveguides and silicon inverted tapers, no requirement on partially etching in fabrication processes. The measured coupling losses of ~ 2dB are proved with the calculation results, the broad-band range of more than 100nm range.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
A Compact Adiabatic Silicon Photonic Edge Coupler Based on Silicon Nitride/Silicon Trident Structure

Xin Mu,Sailong Wu,Lirong Cheng,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/ICOCN.2019.8934126

2019-01-01

Abstract:We propose a novel compact adiabatic fiber-to-chip edge coupler based on a silicon nitride/silicon trident structure. The edge coupler can achieve high coupling efficiency up to 81% (namely 0.91 dB) with 3.2-μm lensed fiber in an ultra-broad bandwidth covering both the O-band and the C-band. It enables adiabatic mode conversion with a total length as short as 80 μm. The silicon nitride/silicon edge coupler is compatible with CMOS process and fabrication tolerance is also analysed for future fabrication and measurement.
Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

Bo Xiono,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
High-efficient and compact vertical grating coupler with achromatic in-plane metalens

Bo Xiong,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Haoyang Tan,Baobao Chen,Yi Zhao,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.1109/lpt.2023.3326185

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:A unidirectional dual-wavelength-band grating coupler with one-dimensional (1D) subwavelength structures is proposed and experimentally demonstrated. Inverse optimization method is used for the design and the grating coupler fabricated on the silicon-on-insulator chip can achieve efficient fiber-chip coupling simultaneously in the O-band and the L-band. The peak coupling efficiencies in the two bands are measured to be 19.7% and 19.5% with 3-dB bandwidths of 27 and 38-nm, respectively.
CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

Zhen Wang,Jin Zhang,Lei Zhang,Xiaoke Ruan,Weijie Tang,Tao Chu

DOI: https://doi.org/10.3390/mi14010066

IF: 3.4

2022-01-01

Micromachines

Abstract:Edge coupler is a key component of silicon-based optoelectronic chips, which dramatically reduces the coupling loss between fibers and transmission waveguides. Here, we propose an ultralow-loss three-step silicon edge coupler based on a 130 nm CMOS process. By replacing the silicon substrate with a material with a lower refractive index than silicon oxide, the silicon leakage loss and polarization-dependent loss can be significantly improved. This structure avoids the existence of a cantilever, which enhances the mechanical strength of the edge coupler. Coupling with standard single-mode fiber, the simulation results demonstrate that the TE/TM mode has an ultralow loss of 0.63/1.08 dB at 1310 nm and 0.57/1.34 dB at 1550 nm, and the 0.5 dB bandwidth covering the entire communication band is about 400 nm. In the entire communication band, the polarization-dependent loss is less than 0.8 dB. Furthermore, we propose a taper shape design method based on mode analysis, which can be adapted for any taper to improve its compactness. Compared with the parabolic shape, the coupling loss of the edge coupler with a length of 460 μm for the TE mode is improved by 0.3 dB on average, this edge coupler provides a feasible solution for fiber-to-chip coupling and is perfectly suitable for wavelength division multiplexing applications in optical communications.
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Zhang Can,Sun Jing-Hua,Xiao Xi,Sun Wei-Min,Zhang Xiao-Jun,Chu Tao,Yu Jin-Zhong,Yu

DOI: https://doi.org/10.1088/0256-307x/30/1/014207

2013-01-01

Chinese Physics Letters

Abstract:A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>−1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
High Efficiency Silicon Edge Coupler Based on Uniform Arrayed Waveguides with Un-Patterned Cladding

Weixi Liu,Jianhao Zhang,Liu,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1109/lpt.2020.3011188

IF: 2.6

2020-01-01

IEEE Photonics Technology Letters

Abstract:In this work, we demonstrate an edge coupler (EC) for the coupling between the single mode fiber (SMF) and the silicon photonic waveguide. High coupling efficiency can be achieved by using arrayed waveguides at 1550 nm with an un-patterned cladding. With such a design, the light will be “pulled” to the top cladding, avoid the using of a cantilever structure. Compared to the conventional inverse taper spot size converter, the widths for the arrayed waveguides are the same, thus it is not critical to determine the position of the end facet for dicing/polishing. We fabricated the proposed structure with only one-step lithography following by a dry etching process. The measured coupling loss is around 1.7 dB/facet, which agrees well with the simulations.
High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Jian Jian,Pengfei Xu,Hui Chen,Mingbo He,Zeru Wu,Lidan Zhou,Lin Liu,Chunchuan Yang,Siyuan Yu

DOI: https://doi.org/10.1364/OE.26.029651

IF: 3.8

2018-01-01

Optics Express

Abstract:We demonstrate hybrid amorphous silicon uniform grating couplers for efficient coupling between the standard single-mode fiber and sub-micron lithium niobate waveguides. The grating couplers exhibit coupling efficiency of -3.06 dB and 1-dB bandwidth of 55 nm. The amorphous silicon grating couplers can also provide a universal building block applicable to other photonic platforms such as silicon nitride waveguides, whose moderate refractive index values prevent high efficiency grating couplers to be fabricated in the native waveguide. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

Xiangyu Luo,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1016/j.optlastec.2023.109860

2024-01-01

Abstract:O-band high-efficiency grating couplers were designed, and experimentally demonstrated with novel gradient index-matching subwavelength structures to reduce the leakage loss and mode mismatch. Trapezoidal subwavelength gratings and apodization were implemented to realize the change in the gradual effective index guided by the effective medium theory and improve the coupling efficiency. The grating couplers were fabricated with a simple single-step etching process. The measured lowest coupling losses of conventional rectangular and trapezoidal SWG grating couplers were -1.93 dB and -1.72 dB in the O-band, respectively. The latter result is the lowest reported losses of single-step etched grating couplers in the O-band with a minimum feature size of 120 nm, which is the typical minimum feature size in 130 nm CMOS node commercial silicon photonic processes.
Novel Dispersive and Focusing Device Configuration Based on Curved Waveguide Grating (CWG).

Yinlei Hao,Yaming Wu,Jianyi Yang,Xiaoqing Jiang,Minghua Wang

DOI: https://doi.org/10.1364/oe.14.008630

IF: 3.8

2006-01-01

Optics Express

Abstract:Configuration of a novel compact dispersive and focusing device based on a Curved Waveguide Grating (CWG) is presented, which is essentially an integrated optic wavelength demultiplexer consisting of a curved stripe waveguide with tilted grating, a slab waveguide adjacent to it, and a set of output waveguides locate on focal line of the curved waveguide. Underlying wavelength demultiplexing mechanism of CWG is theoretically illustrated by employing the Fourier optics approach. Analysis shows that device based on CWG possesses fine wavelength resolution, compact configuration, and potentially low cost as well, which make it a promising wavelength demultiplexer, or a network performance monitor, in DWDM optical networks.
Compact and efficient coupler to interface hybrid dielectric-loaded plasmonic waveguide with silicon photonic slab waveguide

rakesh g mote,hongson chu,ping bai,erping li

DOI: https://doi.org/10.1016/j.optcom.2012.04.037

IF: 2.4

2012-01-01

Optics Communications

Abstract:A coupler is proposed to interface a hybrid dielectric-loaded plasmonic waveguide (HDLPW) with a silicon photonic slab waveguide. The HDLPW is firstly designed and optimized to attain the best tradeoff between the mode confinement and the propagation distance. The designed coupler is inspired from the taper configuration and numerically modeled through finite-difference time-domain (FDTD) simulation. The results demonstrate that a high confinement and low loss of the energy is achieved from a silicon photonic slab waveguide into the dielectric slot of area 50×200nm2 in the HDLPW. The transmission attained through the coupler with a compact size of 400nm is found to be as high as 80% (1dB). Further, the planar nature of taper configuration makes the coupler easy to fabricate using the state-of-the-art CMOS facilities. The proposed coupler is useful in enabling the integration between photonic and hybrid plasmonic waveguides and thus realizing on-chip hybrid integrated circuits.
Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Siya Wang,Yue Hong,Yuntao Zhu,Jingye Chen,Shengqian Gao,Xinlun Cai,Yaocheng Shi,Liu

DOI: https://doi.org/10.1364/oe.25.022032

IF: 3.8

2017-01-01

Optics Express

Abstract:A compact, high-efficiency grating coupler is demonstrated for interfacing a silicon waveguide and a perfectly-vertical fiber at O-band. The grating lies on a tilted silicon membrane for minimizing the reflections. Circular grating lines are adopted to shorten the overall device length to about 60μm. 57% peak coupling efficiency and >28nm 1-dB coupling bandwidth are obtained experimentally. Back reflections of 1% to the silicon waveguide and the single mode fiber are theoretically estimated. The processing flow to realize the proposed structure is discussed in detail. The fabrication control over the tilted angle of the silicon membrane is investigated. The approach by applying an oxide cladding to improve the stability of the membrane is also introduced. The present grating coupler is compatible to common fabrication processes for silicon photonic chips.
Low-loss and high stability standard single mode fiber edge couplers for silicon photonics

Jiyao Yu,Bojin Pan,G. Cao,Junbo Feng,Yu Li,Bowen Li

DOI: https://doi.org/10.1117/12.2652019

2023-01-23

Abstract:Efficient optical coupling between standard single mode fibers and nanophotonic waveguides has been recognized as a major practical challenge since the early years of photonics. In this work, a low-loss and wide band edge coupler based on subwavelength gratings (SWG) for standard single mode fibers is proposed and demonstrated on 220 nm SOI platform. The edge coupler has a minimum feature size of 130 nm and a 630-m length, which was fabricated in CUMEC’s 200 mm CMOS production facilities. The best coupling losses are 1.60 and 1.95 dB for TE and TMin1500-1600 nm wavelength range, respectively, achieving a minimum PDL of 0.2 dB at 1500 nm. Moreover, by taking advantage of SiN-on-Si integrated process and wafer bonding process, the edge coupler exhibits high process and package reliability, making it attractive for the commercial application.

Engineering,Physics
Compact broadband silicon 3 dB coupler based on shortcuts to adiabaticity.

Defen Guo,Tao Chu

DOI: https://doi.org/10.1364/OL.43.004795

IF: 3.6

2018-01-01

Optics Letters

Abstract:We proposed and experimentally demonstrated a compact, broadband, and low-loss-mode-evolution-based 2 x 23 dB coupler on a silicon-on-insulator platform. The waveguide widths and separations of the coupler were tapered in an optimal manner using the shortcuts to the adiabaticity method. The coupler, with a similar to 70 mu m total length and 200 nm feature size, exhibited <0.3 dB measured excess loss over a broadband wavelength range from 1500 to 1600 nm. Balanced and unbalanced Mach-Zehnder interferometers fabricated for validation showed extinction ratios larger than 27 and 23 dB, respectively, over a 100 nm bandwidth. The extracted splitting ratio was between 0.48 and 0.52. (C) 2018 Optical Society of America
Low-Loss Silica Edge Coupler Based on Cascaded Gratings With Multiple Duty Ratios

Manzhuo Wang,Jimin Fang,Tingyu Liu,Zhentao Yao,Chaoyang Sun,Xiaoqiang Sun,Yuanda Wu,Daming Zhang

DOI: https://doi.org/10.1109/lpt.2024.3483902

IF: 2.6

2024-11-02

IEEE Photonics Technology Letters

Abstract:A silica edge coupler based on cascaded gratings with four different duty ratios is demonstrated. Finite-difference time-domain method is adopted in the coupler optimization. Ultraviolet photolithography, plasma etching and chemical vapor deposition have been adopted in the coupler preparation. When the refractive index difference between the silica core and cladding layers is 2%, the measured coupling loss is 0.52 dB/facet at the wavelength 1550 nm. The bandwidth with a penalty less than 1 dB/facet exceeds 318 nm (1300 nm - 1507 nm and 1509 nm - 1620 nm). Features of large alignment tolerance promise the edge coupler good potentials on silica platform.

engineering, electrical & electronic,optics,physics, applied
High-performance Subwavelength Grating Coupler Based on High-Reflectivity Grating Reflector

Junbo Yang,Zhang Jingjing,Suzhi Xu,Shengli Chang

DOI: https://doi.org/10.1117/1.oe.53.9.096107

IF: 1.3

2014-01-01

Optical Engineering

Abstract:A high-performance and compact binary blazed subwavelength grating coupler was designed, which consists of the upper grating coupler and the lower layer grating reflector. A large part of light transmitted out to the substrate due to the existence of gratings can be efficiently reflected with normal incidence. Then, the propagating light is augmented and the coupling efficiency obtains its maximum value. By the appropriate choice of grating parameters, including thicknesses, periods, height, and filling factor, a coupling efficiency of beyond 80% at wavelengths from 1.535 to 1.555 mu m is calculated. Finally, the device layout is simple, feasible, and compatible with standard complementary metal-oxide semiconductor technology processing. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

Ltra-Compact Silicon Photonic Edge Coupler Based On Subwavelength Gratings

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

A Compact Adiabatic Silicon Photonic Edge Coupler Based on Silicon Nitride/Silicon Trident Structure

Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

High-efficient and compact vertical grating coupler with achromatic in-plane metalens

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

High Efficiency Silicon Edge Coupler Based on Uniform Arrayed Waveguides with Un-Patterned Cladding

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

Novel Dispersive and Focusing Device Configuration Based on Curved Waveguide Grating (CWG).

Compact and efficient coupler to interface hybrid dielectric-loaded plasmonic waveguide with silicon photonic slab waveguide

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Low-loss and high stability standard single mode fiber edge couplers for silicon photonics

Compact broadband silicon 3 dB coupler based on shortcuts to adiabaticity.

Low-Loss Silica Edge Coupler Based on Cascaded Gratings With Multiple Duty Ratios

High-performance Subwavelength Grating Coupler Based on High-Reflectivity Grating Reflector