Abstract:Efficient coupling between integrated optical waveguides and optical fibers is essential to the success of silicon photonics. While many solutions exist, perfectly vertical grating couplers that scatter light out of a waveguide in the direction normal to the waveguide's top surface are an ideal candidate due to their potential to reduce packaging complexity. Designing such couplers with high efficiencies, however, has proven difficult. In this paper, we use inverse electromagnetic design techniques to optimize a high efficiency two-layer perfectly vertical silicon grating coupler. Our base design achieves a chip-to-fiber coupling efficiency of 99.2% (-0.035 dB) at 1550 nm. Using this base design as a starting point, we run subsequent constrained optimizations to realize vertical couplers with coupling efficiencies over 96% and back reflections of less than -40 dB which can be fabricated using 65 nm-resolution lithography. These results demonstrate a new path forward for designing fabrication-tolerant ultra high efficiency grating couplers.

High-efficient and compact vertical grating coupler with achromatic in-plane metalens

Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Design and demonstration of high efficiency perfectly vertical grating couplers with a random structure

Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

High Efficient Vertical Binary Blazed Grating Coupler for Chip Level Optical Interconnections

Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

Highly Efficient and Perfectly Vertical Chip-To-Fiber Dual-Layer Grating Coupler

Ltra-Compact Silicon Photonic Edge Coupler Based On Subwavelength Gratings

Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Compact, Broadband, and Wide-Angle Optical Coupling for Silicon Waveguide

High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Inverse design of near unity efficiency perfectly vertical grating couplers

Perfectly Vertical Grating Coupler for O and C-band

High-efficiency vertically emitting coupler facilitated by three wave interaction gratings