Perfectly Vertical Grating Coupler for O and C-band

Lirong Cheng,Xin Mu,Sailong Wu,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1364/fio.2019.jw4a.57

2019-01-01

Abstract:We design and simulate a perfectly vertical grating coupler for dual-wavelength-band operation on 220 nm SOI platform. Peak coupling efficiency of the proposed coupler can reach 70.8% for C-band and 45.0% for O-band.

What problem does this paper attempt to address?

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Siya Wang,Yue Hong,Yuntao Zhu,Jingye Chen,Shengqian Gao,Xinlun Cai,Yaocheng Shi,Liu

DOI: https://doi.org/10.1364/oe.25.022032

IF: 3.8

2017-01-01

Optics Express

Abstract:A compact, high-efficiency grating coupler is demonstrated for interfacing a silicon waveguide and a perfectly-vertical fiber at O-band. The grating lies on a tilted silicon membrane for minimizing the reflections. Circular grating lines are adopted to shorten the overall device length to about 60μm. 57% peak coupling efficiency and >28nm 1-dB coupling bandwidth are obtained experimentally. Back reflections of 1% to the silicon waveguide and the single mode fiber are theoretically estimated. The processing flow to realize the proposed structure is discussed in detail. The fabrication control over the tilted angle of the silicon membrane is investigated. The approach by applying an oxide cladding to improve the stability of the membrane is also introduced. The present grating coupler is compatible to common fabrication processes for silicon photonic chips.
High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Zhang Can,Sun Jing-Hua,Xiao Xi,Sun Wei-Min,Zhang Xiao-Jun,Chu Tao,Yu Jin-Zhong,Yu

DOI: https://doi.org/10.1088/0256-307x/30/1/014207

2013-01-01

Chinese Physics Letters

Abstract:A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>−1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
High-efficient and compact vertical grating coupler with achromatic in-plane metalens

Bo Xiong,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

Bo Xiono,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Lirong Cheng,Simei Mao,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/jlt.2021.3090172

IF: 4.7

2021-01-01

Journal of Lightwave Technology

Abstract:We propose and design a novel dual-wavelength-band grating coupler on 220-nm-thick silicon-on-insulator and experimentally investigate its capability to couple two wavelength bands simultaneously under surface-normal fiber placement. Such dual-wavelength-band operation take advantage of a dual-etch grating design not only with increased directionality but also with unique diffraction angle dispersion characteristics for the two targeted wavelength bands. The role of high numerical aperture fiber is theoretically investigated, leading to reduced angular sensitivity in general and subsequently increased coupling efficiency for our proposed dual-wavelength-band operation scheme. Our device is further fabricated using 248-nm deep-UV lithography on an 8-inch wafer for verification. The peak coupling efficiency is measured to be -5.0 dB at 1275 nm and -5.9 dB at 1519 nm for O-band and S/C-band respectively.
A multilayer dual-band coupler based on composite right/left-handed folded substrate integrated waveguide

Li-Zheng Zhang,Liang Zhou,Wei Jiang,Wen-Yan Yin

DOI: https://doi.org/10.1109/ICMMT.2012.6230222

2012-01-01

Abstract:A multilayer dual-band coupler, based on the composite right/left-handed (CRLH) folded substrate integrated waveguide (FSIW) transmission line (TL), is proposed and investigated. The characterization of the CRLH FSIW and the coupling method are performed to realize a 3 dB coupler with compact size. For verification, a dual-band coupler operating at 2.4 GHz/3.8 GHz is designed, fabricated and measured. The simulated and measured results are shown reasonable agreements.
Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

Lirong Cheng,Simei Mao,Xin Mu,Sailong Wu,H. Y. Fu

DOI: https://doi.org/10.1364/cleo_at.2020.jth2f.8

2020-01-01

Abstract:We propose and design a dual-layer grating coupler for dual-wavelength-band multiplexing on multilayer SiN-on-SOI photonic integrated platform. Its peak coupling efficiencies are -2.95 dB for O-band and -2.49 dB for C-band.
High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Haoyang Tan,Baobao Chen,Yi Zhao,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.1109/lpt.2023.3326185

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:A unidirectional dual-wavelength-band grating coupler with one-dimensional (1D) subwavelength structures is proposed and experimentally demonstrated. Inverse optimization method is used for the design and the grating coupler fabricated on the silicon-on-insulator chip can achieve efficient fiber-chip coupling simultaneously in the O-band and the L-band. The peak coupling efficiencies in the two bands are measured to be 19.7% and 19.5% with 3-dB bandwidths of 27 and 38-nm, respectively.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure

Liu Liu,Jianhao Zhang,Chenzhao Zhang,Siya Wang,Chichao Jin,Yujie Chen,Kaixuan Chen,Tuowen Xiang,Yaocheng Shi

DOI: https://doi.org/10.1364/OL.41.000820

IF: 3.6

2016-01-01

Optics Letters

Abstract:A grating coupler for interfacing between a silicon-on-insulator waveguide and a single-mode fiber located at a perfectly vertical direction is demonstrated based on a tilted membrane structure. The proposed design is compatible with that of conventional grating couplers for oblique fibers and facilitates mass production. A peak coupling efficiency of 28.5% and 1 dB bandwidth of 38 nm are obtained experimentally for transverse-electrics polarized light. Back reflection in the SOI waveguide is also estimated to be 1.4%. The present grating coupler for perfectly vertical fiber exhibits similar performances to the conventional grating coupler for oblique fiber concerning coupling efficiency, bandwidth, and back reflections. (C) 2016 Optical Society of America
Highly Efficient and Perfectly Vertical Chip-To-Fiber Dual-Layer Grating Coupler

Ming Dai,Leilei Ma,Yelong Xu,Minghui Lu,Xiaoping Liu,Yanfeng Chen

DOI: https://doi.org/10.1364/oe.23.001691

IF: 3.8

2015-01-01

Optics Express

Abstract:A novel high-efficiency silicon-chip-to-fiber grating coupler is investigated here. By introducing a dual layer grating structure with an inter-layer lateral shift to mimic 45° tilted mirror behavior, perfectly vertical coupling is successfully demonstrated. Our numerical results show that a peak silicon-chip-to-fiber coupling efficiency about 70% is possible near 1550 nm. Meanwhile, for the entire telecom C-band, i.e. wavelengths from 1530 nm to 1565 nm, the coupling efficiency is > 50% and the back reflection is less than < 1%. Our proposed high-performance silicon perfectly vertical coupling structure is suitable for interfacing with multi-core fiber platform, which may play an important role in the future CMOS photonic integration technology.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

Zan Zhang,Beiju Huang,Zanyun Zhang,Chuantong Cheng,Bing Bai,Tianxi Gao,Xiaobo Xu,Wenping Gu,Lin Zhang,Hongda Chen

DOI: https://doi.org/10.3390/mi11090859

IF: 3.4

2020-09-17

Micromachines

Abstract:We propose a broadband high-efficiency grating coupler for perfectly vertical fiber-to-chip coupling. The up-reflection is reduced, hence enhanced coupling efficiency is achieved with the help of a Fabry-Perot-like cavity composed of a silicon nitride reflector and the grating itself. With the theory of the Fabry-Perot cavity, the dimensional parameters of the coupler are investigated. With the optimized parameters, up-reflection in the C-band is reduced from 10.6% to 5%, resulting in an enhanced coupling efficiency of 80.3%, with a 1-dB bandwidth of 58 nm, which covers the entire C-band. The minimum feature size of the proposed structure is over 219 nm, which makes our design easy to fabricate through 248 nm deep-UV lithography, and lowers the fabrication cost. The proposed design has potential in efficient and fabrication-tolerant interfacing applications, between off-chip light sources and integrated chips that can be mass-produced.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

Lirong Cheng,Simei Mao,H. Y. Fu

DOI: https://doi.org/10.1364/acpc.2021.t1i.2

2021-01-01

Abstract:We demonstrate dual-band and triple-band operating grating couplers on silicon-on-insulator. These grating couplers simultaneously couple multiple bands and spatially separating them with calculated coupling efficiencies of <4 dB for all bands.
Design and demonstration of high efficiency perfectly vertical grating couplers with a random structure

Xin Jin,Jinbin Xu,Cuiwei Xue,Chenxing Guo,Liucheng Fu,Min Liu,Yunliang Shen,Xueling Quan,Xiulan Cheng

DOI: https://doi.org/10.1364/ol.519489

IF: 3.6

2024-04-01

Optics Letters

Abstract:Utilizing an automated optimization method, we propose a perfectly vertical grating coupler (PVGC) characterized by random structure, superior performance, simplified fabrication process, and increased minimum feature size (MFS). Within the range of MFS from 60 to 180 nm, the optimized PVGC exhibited a simulated coupling efficiency of approximately −2.0 dB at 1550 nm with a 34 nm 1-dB bandwidth. Experimental results for the PVGCs fabricated by electron beam lithography (EBL) demonstrated coupling efficiencies ranging from −2.5 to −2.8 dB with a 32 nm 1-dB bandwidth while maintaining high manufacturing tolerances. This represents the most outstanding experimental outcome to date regarding the coupling performance of a PVGC fabricated on a 220 nm silicon on insulator (SOI), without requiring any complex processes as reported in the existing literature.

optics
Fully-etched apodized fiber-to-chip grating coupler on the SOI platform with −0.78 dB coupling efficiency using photonic crystals and bonded Al mirror

Yunhong Ding,Haiyan Ou,Peucheret, C.,Yvind, K.

DOI: https://doi.org/10.1109/ECOC.2014.6963889

2014-01-01

Abstract:We design and fabricate an ultra-high coupling efficiency fully-etched apodized grating coupler on the SOI platform using photonic crystals and bonded aluminum mirror. Ultra-high coupling efficiency of -0.78 dB with a 3 dB bandwidth of 74 nm are demonstrated.
Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

Xiangyu Luo,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1016/j.optlastec.2023.109860

2024-01-01

Abstract:O-band high-efficiency grating couplers were designed, and experimentally demonstrated with novel gradient index-matching subwavelength structures to reduce the leakage loss and mode mismatch. Trapezoidal subwavelength gratings and apodization were implemented to realize the change in the gradual effective index guided by the effective medium theory and improve the coupling efficiency. The grating couplers were fabricated with a simple single-step etching process. The measured lowest coupling losses of conventional rectangular and trapezoidal SWG grating couplers were -1.93 dB and -1.72 dB in the O-band, respectively. The latter result is the lowest reported losses of single-step etched grating couplers in the O-band with a minimum feature size of 120 nm, which is the typical minimum feature size in 130 nm CMOS node commercial silicon photonic processes.
Resonance-Enhanced Wideband Grating for Efficient Perfectly Vertical Coupling

Xuetong Zhou,Yi Wang,Zunyue Zhang,Hon Ki Tsang

DOI: https://doi.org/10.1109/lpt.2024.3379551

IF: 2.6

2024-03-29

IEEE Photonics Technology Letters

Abstract:In this letter, we propose and experimentally validate a resonance enhanced center-symmetric structure to increase the optical bandwidth of waveguide grating couplers. Our experimental results demonstrate state of the art performance in increasing the 1dB optical bandwidth of perfectly vertical grating couplers to 121 nm for standard single mode fiber.

engineering, electrical & electronic,optics,physics, applied
Fully etched apodized grating coupler on the SOI platform with −0.58 dB coupling efficiency

yunhong ding,christophe peucheret,haiyan ou,kresten yvind

DOI: https://doi.org/10.1364/OL.39.005348

IF: 3.6

2014-01-01

Optics Letters

Abstract:We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of -0.58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated. (C) 2014 Optical Society of America
Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

Chung-Chih Lin,Yen-Cheng Lu,Yu-Hsuan Liu,Likarn Wang,Neil Na

DOI: https://doi.org/10.3390/s23104662

IF: 3.9

2023-05-12

Sensors

Abstract:An efficient optical coupler to transfer the signal between an optical fiber and a silicon waveguide is essential for realizing the applications of silicon photonic integrated circuits such as optical communication and optical sensing. In this paper, we numerically demonstrate a two-dimensional grating coupler based on a silicon-on-insulator platform to obtain completely vertical and polarization-independent couplings, which potentially ease the difficulty of packaging and measurement of photonic integrated circuits. To mitigate the coupling loss induced by the second-order diffraction, two corner mirrors are respectively placed at the two orthogonal ends of the two-dimensional grating coupler to create appropriate interference conditions. Partial single-etch is assumed to form an asymmetric grating to obtain high directionalities without a bottom mirror. The two-dimensional grating coupler is optimized and verified with finite-difference time-domain simulations, achieving a high coupling efficiency of −1.53 dB and a low polarization-dependent loss of 0.015 dB when coupling to a standard single-mode fiber at approximately 1310 nm wavelength.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

Perfectly Vertical Grating Coupler for O and C-band

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

High-efficient and compact vertical grating coupler with achromatic in-plane metalens

Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

A multilayer dual-band coupler based on composite right/left-handed folded substrate integrated waveguide

Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure

Highly Efficient and Perfectly Vertical Chip-To-Fiber Dual-Layer Grating Coupler

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

Design and demonstration of high efficiency perfectly vertical grating couplers with a random structure

Fully-etched apodized fiber-to-chip grating coupler on the SOI platform with −0.78 dB coupling efficiency using photonic crystals and bonded Al mirror

Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

Resonance-Enhanced Wideband Grating for Efficient Perfectly Vertical Coupling

Fully etched apodized grating coupler on the SOI platform with −0.58 dB coupling efficiency

Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency