Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

Lirong Cheng,Simei Mao,Xin Mu,Sailong Wu,H. Y. Fu

DOI: https://doi.org/10.1364/cleo_at.2020.jth2f.8

2020-01-01

Abstract:We propose and design a dual-layer grating coupler for dual-wavelength-band multiplexing on multilayer SiN-on-SOI photonic integrated platform. Its peak coupling efficiencies are -2.95 dB for O-band and -2.49 dB for C-band.

What problem does this paper attempt to address?

A Nonreciprocal Add-Drop Multiplexer Based on Grating Assisted Couplers

Huiye Qiu,Ting Hu,Ping Yu,Ying Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1016/j.ijleo.2015.07.195

IF: 3.1

2015-01-01

Optik

Abstract:We propose a nonreciprocal optical add-drop multiplexer with silicon waveguide, which is realized by grating assisted coupler employing magneto-optical nonceciprocal phase shift. This device can achieve different adding or dropping peak wavelengths when light is launched in the forward-directed and backward-directed propagation. The calculation results show that the shift of the different dropping peak wavelengths is up to 0.7nm. Also, we demonstrate its applications for narrowband optical isolators and circulators. This work demonstrates that on-chip nonreciprocal optical add-drop multiplexers and optical isolations can be implemented with the proposed device, which has promising applications for optical communication systems and photonic integrated devices.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Lirong Cheng,Simei Mao,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/jlt.2021.3090172

IF: 4.7

2021-01-01

Journal of Lightwave Technology

Abstract:We propose and design a novel dual-wavelength-band grating coupler on 220-nm-thick silicon-on-insulator and experimentally investigate its capability to couple two wavelength bands simultaneously under surface-normal fiber placement. Such dual-wavelength-band operation take advantage of a dual-etch grating design not only with increased directionality but also with unique diffraction angle dispersion characteristics for the two targeted wavelength bands. The role of high numerical aperture fiber is theoretically investigated, leading to reduced angular sensitivity in general and subsequently increased coupling efficiency for our proposed dual-wavelength-band operation scheme. Our device is further fabricated using 248-nm deep-UV lithography on an 8-inch wafer for verification. The peak coupling efficiency is measured to be -5.0 dB at 1275 nm and -5.9 dB at 1519 nm for O-band and S/C-band respectively.
Fiber-Chip Bi-Wavelength Multiplexing with Subwavelength Single-Etch Grating Coupler and Diplexer

Lirong Cheng,Simei Mao,Yinghui Wang,H. Y. Fu

DOI: https://doi.org/10.1109/jphot.2022.3143689

IF: 2.4

2022-01-01

IEEE Photonics Journal

Abstract:We propose a silicon photonicgrating coupling scheme for dual-band multiplexing in optical fibers. By utilizing subwavelength grating effective refractive index engineering, a dual-band operating grating coupler and a wavelength-polarization diplexer are designed. Both devices are fabricated on a 220-nm silicon-on-insulator and require only one 220-nm full etch step to facilitate cost-effective production. The subwavelength grating coupler guides S-band and O-band lights from a single-mode fiber into a waveguide as transverse-electric and transverse-magnetic modes, while the subwavelength diplexer separates the two signals into two waveguides. Experimentally, our proposed scheme for coupling and multiplexing can achieve a total insertion loss of –4.26 dB at near 1490 nm and –5.86 dB at near 1310 nm.
High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Zhang Can,Sun Jing-Hua,Xiao Xi,Sun Wei-Min,Zhang Xiao-Jun,Chu Tao,Yu Jin-Zhong,Yu

DOI: https://doi.org/10.1088/0256-307x/30/1/014207

2013-01-01

Chinese Physics Letters

Abstract:A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>−1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

Lirong Cheng,Simei Mao,H. Y. Fu

DOI: https://doi.org/10.1364/acpc.2021.t1i.2

2021-01-01

Abstract:We demonstrate dual-band and triple-band operating grating couplers on silicon-on-insulator. These grating couplers simultaneously couple multiple bands and spatially separating them with calculated coupling efficiencies of <4 dB for all bands.
High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Haoyang Tan,Baobao Chen,Yi Zhao,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.1109/lpt.2023.3326185

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:A unidirectional dual-wavelength-band grating coupler with one-dimensional (1D) subwavelength structures is proposed and experimentally demonstrated. Inverse optimization method is used for the design and the grating coupler fabricated on the silicon-on-insulator chip can achieve efficient fiber-chip coupling simultaneously in the O-band and the L-band. The peak coupling efficiencies in the two bands are measured to be 19.7% and 19.5% with 3-dB bandwidths of 27 and 38-nm, respectively.
A multilayer dual-band coupler based on composite right/left-handed folded substrate integrated waveguide

Li-Zheng Zhang,Liang Zhou,Wei Jiang,Wen-Yan Yin

DOI: https://doi.org/10.1109/ICMMT.2012.6230222

2012-01-01

Abstract:A multilayer dual-band coupler, based on the composite right/left-handed (CRLH) folded substrate integrated waveguide (FSIW) transmission line (TL), is proposed and investigated. The characterization of the CRLH FSIW and the coupling method are performed to realize a 3 dB coupler with compact size. For verification, a dual-band coupler operating at 2.4 GHz/3.8 GHz is designed, fabricated and measured. The simulated and measured results are shown reasonable agreements.
Dual-layer SiNx-on-SOI Grating Coupler As an Efficient Higher-Order Fiber Mode Multiplexer

Lirong Cheng,Simei Mao,Yixiang Hu,H. Y. Fu

DOI: https://doi.org/10.1364/cleo_at.2021.jw1a.178

2021-01-01

Abstract:We demonstrate a dual-layer grating coupler as an efficient higher-order fiber mode multiplexer. Four channels from a fiber array can be multiplexed into four distinct TE-polarized modes in a few-mode fiber using the proposed multiplexer.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
High-Efficiency Dual-Band-Multiplexing Three-Port Grating Coupler On 220-Nm Silicon-On-Insulator With 248-Nm Deep-Uv Lithography

Lirong Cheng,Simei Mao,Zhi Li,Xin Tu,H Y Fu

DOI: https://doi.org/10.1364/OL.430807

IF: 3.6

2021-01-01

Optics Letters

Abstract:We experimentally demonstrate a novel, to the best of our knowledge, three-port grating coupler (TPGC) for dual-wavelength-band operation. The TPGC can couple light to/from two ports for S/C-band with polarization diversity and a third port for O-band. Such a coupling scheme could be applied in an integrated wavelength-division-multiplexing passive optical network (PON) unit, benefiting a polarization-diverse receiver for downstream S/C-band and transmitter for upstream O-band. The device is fabricated on a multi-project wafer, with peak coupling efficiency measured to be -3.8 dB and -5.4 dB for O-band. and S/C-band, respectively. We also present a proof-ofconcept demonstration for 10-Gb/s PON transmission based on the TPGC. (C) 2021 Optical Society of America
Three-Port Dual-Wavelength-Band Grating Coupler for WDM-PON Applications

Lirong Cheng,Simei Mao,Caiyue Zhao,Xin Tu,Qian Li,H. Y. Fu

DOI: https://doi.org/10.1109/lpt.2021.3049270

IF: 2.6

2021-01-01

IEEE Photonics Technology Letters

Abstract:Grating coupling is a widely adopted strategy for coupling light into optical waveguides. While this versatile approach benefits both fabrication and alignment, grating couplers are particularly sensitive to both wavelength and polarization. These drawbacks hinder its application in integrated wavelength-division-multiplexing passive optical network (WDM-PON) transceivers, where widely separated wavelength bands are utilized for upstream and downstream signals. In this letter, we propose a three-port grating coupler that enables polarization-independent receiving for the downstream signal from fiber and single-polarized coupling of the upstream signal from chip. Dual-wavelength-band operation is obtained by adding an output port to couple upstream wavelength on existing polarization-splitting grating coupler for downstream wavelength. Peak coupling efficiencies of -2.93 dB and -3.50 dB are achieved for 1266 nm and 1481 nm respectively. This grating coupler design can be adopted in transceivers for fiber-to-the-home (FTTH) networks.
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
Perfectly Vertical Grating Coupler for O and C-band

Lirong Cheng,Xin Mu,Sailong Wu,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1364/fio.2019.jw4a.57

2019-01-01

Abstract:We design and simulate a perfectly vertical grating coupler for dual-wavelength-band operation on 220 nm SOI platform. Peak coupling efficiency of the proposed coupler can reach 70.8% for C-band and 45.0% for O-band.
Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

Yunfei Fu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu,Qingbo Li

DOI: https://doi.org/10.1364/iont.2012.if2a.6

2012-01-01

Abstract:CMOS-compatible broad-band and efficient edge couplers are presented in this paper. The couplers are based on SiON ridge waveguides and silicon inverted tapers, no requirement on partially etching in fabrication processes. The measured coupling losses of ~ 2dB are proved with the calculation results, the broad-band range of more than 100nm range.
An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

shen ao,qiu chen,hu ting,xu chao,jiang xiaoqing,li yubo,yang jianyi

DOI: https://doi.org/10.1088/0256-307X/30/8/084204

2013-01-01

Chinese Physics Letters

Abstract:An eight-channel 400 GHz-spacing planar waveguide multi/demultiplexer employing etched diffraction grating is designed and fabricated on a silicon-on-insulator platform with a 220 nm thick top layer. The design parameters are optimized by scalar diffraction simulation to obtain optimal performance with a small footprint of only 0.75 mm(2). A bi-level adiabatic taper is used to connect the input/output waveguide and the slab waveguide so as to reduce the insertion loss and the broadening of the diffraction angle of the propagating light. The device is fabricated in a two-step process with E-beam lithography and dry etching, and the alignment accuracy is 10 nm or even better. Measurements show that the insertion loss is 7.35 dB and the crosstalk between adjacent channels is about -15 dB. Ways to improve the performance are also investigated in detail.
Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Bin Shen,Hongtao Lin,Florian Merget,Saeed Sharif Azadeh,Chao Li,Guo-Qiang Lo,Kathleen A. Richardson,Juejun Hu,Jeremy Witzens

DOI: https://doi.org/10.1364/oe.27.013781

IF: 3.8

2019-01-01

Optics Express

Abstract:We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process.
Silicon Photonic O-band (de)multiplexers with Flat-Passband

Nannan Ning,Xiaofei Wang,Qikai Huang,Hui Yu

DOI: https://doi.org/10.1117/12.2600444

2021-01-01

Abstract:Based on cascaded Mach-Zehnder lattice filter, an eight-channel silicon photonic (de-)multiplexer with flat passband is demonstrated in the O-band. The insertion loss of the device is -0.55~-2.48dB and the channel crosstalk is below -7dB. The FSR and channel spacing are about 36nm and 4.4nm respectively.
High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform

Xin Mu,Sailong Wu,Lirong Cheng,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/group4.2019.8925686

2019-01-01

Abstract:We propose a vertical interlayer coupler for optical interconnections in multilayer silicon nitride-on-silicon photonic circuits with coupling efficiency of 96.0%. The coupler has a compact size of 170 μm in length and exhibits high performance in an ultra-broad bandwidth.
High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Jian Jian,Pengfei Xu,Hui Chen,Mingbo He,Zeru Wu,Lidan Zhou,Lin Liu,Chunchuan Yang,Siyuan Yu

DOI: https://doi.org/10.1364/OE.26.029651

IF: 3.8

2018-01-01

Optics Express

Abstract:We demonstrate hybrid amorphous silicon uniform grating couplers for efficient coupling between the standard single-mode fiber and sub-micron lithium niobate waveguides. The grating couplers exhibit coupling efficiency of -3.06 dB and 1-dB bandwidth of 55 nm. The amorphous silicon grating couplers can also provide a universal building block applicable to other photonic platforms such as silicon nitride waveguides, whose moderate refractive index values prevent high efficiency grating couplers to be fabricated in the native waveguide. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

A Nonreciprocal Add-Drop Multiplexer Based on Grating Assisted Couplers

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Fiber-Chip Bi-Wavelength Multiplexing with Subwavelength Single-Etch Grating Coupler and Diplexer

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

A multilayer dual-band coupler based on composite right/left-handed folded substrate integrated waveguide

Dual-layer SiNx-on-SOI Grating Coupler As an Efficient Higher-Order Fiber Mode Multiplexer

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

High-Efficiency Dual-Band-Multiplexing Three-Port Grating Coupler On 220-Nm Silicon-On-Insulator With 248-Nm Deep-Uv Lithography

Three-Port Dual-Wavelength-Band Grating Coupler for WDM-PON Applications

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Perfectly Vertical Grating Coupler for O and C-band

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Silicon Photonic O-band (de)multiplexers with Flat-Passband

High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.