Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

Lirong Cheng,Simei Mao,H. Y. Fu

DOI: https://doi.org/10.1364/acpc.2021.t1i.2

2021-01-01

Abstract:We demonstrate dual-band and triple-band operating grating couplers on silicon-on-insulator. These grating couplers simultaneously couple multiple bands and spatially separating them with calculated coupling efficiencies of <4 dB for all bands.

What problem does this paper attempt to address?

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Zhang Can,Sun Jing-Hua,Xiao Xi,Sun Wei-Min,Zhang Xiao-Jun,Chu Tao,Yu Jin-Zhong,Yu

DOI: https://doi.org/10.1088/0256-307x/30/1/014207

2013-01-01

Chinese Physics Letters

Abstract:A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>−1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

Lirong Cheng,Simei Mao,Xin Mu,Sailong Wu,H. Y. Fu

DOI: https://doi.org/10.1364/cleo_at.2020.jth2f.8

2020-01-01

Abstract:We propose and design a dual-layer grating coupler for dual-wavelength-band multiplexing on multilayer SiN-on-SOI photonic integrated platform. Its peak coupling efficiencies are -2.95 dB for O-band and -2.49 dB for C-band.
Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Lirong Cheng,Simei Mao,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/jlt.2021.3090172

IF: 4.7

2021-01-01

Journal of Lightwave Technology

Abstract:We propose and design a novel dual-wavelength-band grating coupler on 220-nm-thick silicon-on-insulator and experimentally investigate its capability to couple two wavelength bands simultaneously under surface-normal fiber placement. Such dual-wavelength-band operation take advantage of a dual-etch grating design not only with increased directionality but also with unique diffraction angle dispersion characteristics for the two targeted wavelength bands. The role of high numerical aperture fiber is theoretically investigated, leading to reduced angular sensitivity in general and subsequently increased coupling efficiency for our proposed dual-wavelength-band operation scheme. Our device is further fabricated using 248-nm deep-UV lithography on an 8-inch wafer for verification. The peak coupling efficiency is measured to be -5.0 dB at 1275 nm and -5.9 dB at 1519 nm for O-band and S/C-band respectively.
High-Efficiency Dual-Band-Multiplexing Three-Port Grating Coupler On 220-Nm Silicon-On-Insulator With 248-Nm Deep-Uv Lithography

Lirong Cheng,Simei Mao,Zhi Li,Xin Tu,H Y Fu

DOI: https://doi.org/10.1364/OL.430807

IF: 3.6

2021-01-01

Optics Letters

Abstract:We experimentally demonstrate a novel, to the best of our knowledge, three-port grating coupler (TPGC) for dual-wavelength-band operation. The TPGC can couple light to/from two ports for S/C-band with polarization diversity and a third port for O-band. Such a coupling scheme could be applied in an integrated wavelength-division-multiplexing passive optical network (PON) unit, benefiting a polarization-diverse receiver for downstream S/C-band and transmitter for upstream O-band. The device is fabricated on a multi-project wafer, with peak coupling efficiency measured to be -3.8 dB and -5.4 dB for O-band. and S/C-band, respectively. We also present a proof-ofconcept demonstration for 10-Gb/s PON transmission based on the TPGC. (C) 2021 Optical Society of America
High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Haoyang Tan,Baobao Chen,Yi Zhao,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.1109/lpt.2023.3326185

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:A unidirectional dual-wavelength-band grating coupler with one-dimensional (1D) subwavelength structures is proposed and experimentally demonstrated. Inverse optimization method is used for the design and the grating coupler fabricated on the silicon-on-insulator chip can achieve efficient fiber-chip coupling simultaneously in the O-band and the L-band. The peak coupling efficiencies in the two bands are measured to be 19.7% and 19.5% with 3-dB bandwidths of 27 and 38-nm, respectively.
Fiber-Chip Bi-Wavelength Multiplexing with Subwavelength Single-Etch Grating Coupler and Diplexer

Lirong Cheng,Simei Mao,Yinghui Wang,H. Y. Fu

DOI: https://doi.org/10.1109/jphot.2022.3143689

IF: 2.4

2022-01-01

IEEE Photonics Journal

Abstract:We propose a silicon photonicgrating coupling scheme for dual-band multiplexing in optical fibers. By utilizing subwavelength grating effective refractive index engineering, a dual-band operating grating coupler and a wavelength-polarization diplexer are designed. Both devices are fabricated on a 220-nm silicon-on-insulator and require only one 220-nm full etch step to facilitate cost-effective production. The subwavelength grating coupler guides S-band and O-band lights from a single-mode fiber into a waveguide as transverse-electric and transverse-magnetic modes, while the subwavelength diplexer separates the two signals into two waveguides. Experimentally, our proposed scheme for coupling and multiplexing can achieve a total insertion loss of –4.26 dB at near 1490 nm and –5.86 dB at near 1310 nm.
Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Bin Shen,Hongtao Lin,Florian Merget,Saeed Sharif Azadeh,Chao Li,Guo-Qiang Lo,Kathleen A. Richardson,Juejun Hu,Jeremy Witzens

DOI: https://doi.org/10.1364/oe.27.013781

IF: 3.8

2019-01-01

Optics Express

Abstract:We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process.
High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Jian Jian,Pengfei Xu,Hui Chen,Mingbo He,Zeru Wu,Lidan Zhou,Lin Liu,Chunchuan Yang,Siyuan Yu

DOI: https://doi.org/10.1364/OE.26.029651

IF: 3.8

2018-01-01

Optics Express

Abstract:We demonstrate hybrid amorphous silicon uniform grating couplers for efficient coupling between the standard single-mode fiber and sub-micron lithium niobate waveguides. The grating couplers exhibit coupling efficiency of -3.06 dB and 1-dB bandwidth of 55 nm. The amorphous silicon grating couplers can also provide a universal building block applicable to other photonic platforms such as silicon nitride waveguides, whose moderate refractive index values prevent high efficiency grating couplers to be fabricated in the native waveguide. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
Silicon Mode Multi/Demultiplexer Based on Multimode Grating-Assisted Couplers

Huiye Qiu,Hui Yu,Ting Hu,Guomin Jiang,Haifeng Shao,Ping Yu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1364/oe.21.017904

IF: 3.8

2013-01-01

Optics Express

Abstract:A simple and low-crosstalk 1 × 4 silicon mode (de)multiplexer based on multimode grating-assisted-couplers is proposed. Mode transitions can be flexibly controlled by designing the grating period at the phase-matching condition. Due to the contra-directional coupling, precise control of the coupling strength and the coupling length are not needed in the system. Calculation results show that the insertion loss and the 3 dB bandwidths of the device are 0.2 dB and 3.7 nm, 0.34 dB and 7.6 nm, and 0.21 dB and 11.8 nm for the channels which (de)multiplex to the 1st, 2nd, and 3rd modes of the bus waveguide, respectively.
Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Siya Wang,Yue Hong,Yuntao Zhu,Jingye Chen,Shengqian Gao,Xinlun Cai,Yaocheng Shi,Liu

DOI: https://doi.org/10.1364/oe.25.022032

IF: 3.8

2017-01-01

Optics Express

Abstract:A compact, high-efficiency grating coupler is demonstrated for interfacing a silicon waveguide and a perfectly-vertical fiber at O-band. The grating lies on a tilted silicon membrane for minimizing the reflections. Circular grating lines are adopted to shorten the overall device length to about 60μm. 57% peak coupling efficiency and >28nm 1-dB coupling bandwidth are obtained experimentally. Back reflections of 1% to the silicon waveguide and the single mode fiber are theoretically estimated. The processing flow to realize the proposed structure is discussed in detail. The fabrication control over the tilted angle of the silicon membrane is investigated. The approach by applying an oxide cladding to improve the stability of the membrane is also introduced. The present grating coupler is compatible to common fabrication processes for silicon photonic chips.
Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

Bo Xiono,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
High-efficiency grating-couplers: demonstration of a new design strategy

Riccardo Marchetti,Cosimo Lacava,Ali Khokhar,Xia Chen,Ilaria Cristiani,David J. Richardson,Graham T. Reed,Periklis Petropoulos,Paolo Minzioni

DOI: https://doi.org/10.1038/s41598-017-16505-z

IF: 4.6

2017-11-30

Scientific Reports

Abstract:We present a simple and practical strategy that allows to design high-efficiency grating couplers. The technique is based on the simultaneous apodization of two structural parameters: the grating period and the fill-factor, along with the optimization of the grating coupler etching depth. Considering a 260 nm Si-thick Silicon-on-insulator platform, we numerically demonstrated a coupling efficiency of −0.8 dB (83%), well matching the experimental value of −0.9 dB (81%). Thanks to the optimized design, these results represent the best performance ever reported in the literature for SOI structures without the use of any back-reflector.

multidisciplinary sciences
High-efficient and compact vertical grating coupler with achromatic in-plane metalens

Bo Xiong,Wei Ma,Weiping Wang,Xiaoyan Hu,Tao Chu

DOI: https://doi.org/10.1364/oe.467418

IF: 3.8

2022-01-01

Optics Express

Abstract:We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.
High-Efficiency Broadband Grating Couplers for Silicon Hybrid Plasmonic Waveguides

Haoyang Tan,Weijie Liu,Yuheng Zhang,Shaojie Yin,Daoxin Dai,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.3390/photonics9080550

IF: 2.536

2022-01-01

Photonics

Abstract:We report the designs of on-chip grating couplers for the silicon hybrid plasmonic waveguides, which is the first proposal, to the best of our knowledge, for the direct coupling between a standard single-mode fiber and a hybrid plasmonic waveguide. By leveraging the apodized gratings and a two-stage-taper mode converter, we obtain a theoretical coupling efficiency of 79% (−1.03 dB) at the 1550 nm wavelength and a 3-dB bandwidth of 73 nm between the fiber and a 100 nm-wide silicon hybrid plasmonic waveguide with a bottom metal layer. We further propose grating couplers for three other sorts of silicon hybrid plasmonic waveguides with a metal cap and theoretically achieve good performances with coupling efficiencies larger than 47% and bandwidths larger than 51 nm. The proposed direct coupling scheme can avoid extra insertion losses and additional alignment processes that conventional indirect coupling schemes produce. It is believed to be a new step forward to the CMOS-compatible and large-scale integration based on the plasmonic waveguides.
High-performance Full-Etched Fiber-to-chip Grating Couplers at 3.7-Micron Wavelength on Silicon

Guojiang Yang,Hengtai Xiang,Zhicheng Li,Laiwen Yu,Yuanrong Li,Yuqi Zhao,Guowu Zhang,Jingshu Guo,Yaocheng Shi,Daoxin Dai

DOI: https://doi.org/10.1063/5.0235403

IF: 5.6

2024-01-01

APL Photonics

Abstract:Mid-infrared (MIR) silicon photonics have attracted great interest for potential applications in on-chip spectroscopy, free-space communication, and remote imaging. Currently, the high-performance and fabrication-friendly fiber-to-chip grating couplers operating at 3–4 μm wavelength band are still desired urgently. Here, we propose an efficient method for designing a 2D subwavelength grating coupler. The few analytical fitting parameters defining the subwavelength grating periods and fill factors in two dimensions enable a high design degree of freedom and a low search space dimension, resulting in high figure-of-merit and fast convergence simultaneously. The developed 3.7 μm grating coupler showcases record-high coupling efficiency both theoretically (−2.2 dB) and experimentally (−4.4 dB) among the 3–4 μm MIR counterparts. This study provides an effective method for designing fiber-to-chip grating couplers, by which the MIR grating couplers with high performance and fabrication ease are developed, thus paving the way for developing high-performance silicon photonic integrated circuits operating in the MIR wavelength band.
Subwavelength TE/TM Grating Coupler Based on Silicon-on-insulator

Jingjing Zhang,Junbo Yang,Huanyu Lu,Wenjun Wu,Jie Huang,Shengli Chang

DOI: https://doi.org/10.1016/j.infrared.2015.06.018

IF: 2.997

2015-01-01

Infrared Physics & Technology

Abstract:In this letter, we report a novel uniform grating coupler, which can couple the light of different polarization from fiber into a single waveguide at same wavelength range. When incident wavelength is 1550nm, for TE mode, the coupling efficiency can achieve more than 50% with ∼30nm 1dB bandwidth. For TM mode, the coupling efficiency can also obtain more than 50% and 35nm 1dB bandwidth. Their corresponding wavelength difference between two polarizations’ coupling peaks is demonstrated to be less than 5nm reported in this letter. Many limits of application about influence of polarization-depend can be solved by this design.
Dual-layer SiNx-on-SOI Grating Coupler As an Efficient Higher-Order Fiber Mode Multiplexer

Lirong Cheng,Simei Mao,Yixiang Hu,H. Y. Fu

DOI: https://doi.org/10.1364/cleo_at.2021.jw1a.178

2021-01-01

Abstract:We demonstrate a dual-layer grating coupler as an efficient higher-order fiber mode multiplexer. Four channels from a fiber array can be multiplexed into four distinct TE-polarized modes in a few-mode fiber using the proposed multiplexer.

Silicon-on-insulator Grating Couplers for Dual-Band and Triple-Band Multiplexing

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

High-Efficiency Dual-Band-Multiplexing Three-Port Grating Coupler On 220-Nm Silicon-On-Insulator With 248-Nm Deep-Uv Lithography

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Fiber-Chip Bi-Wavelength Multiplexing with Subwavelength Single-Etch Grating Coupler and Diplexer

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Silicon Mode Multi/Demultiplexer Based on Multimode Grating-Assisted Couplers

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Compact Vertical Grating Coupler with an Achromatic In-Plane Metalens on a 220-Nm Silicon-on-insulator Platform

High-efficiency grating-couplers: demonstration of a new design strategy

High-efficient and compact vertical grating coupler with achromatic in-plane metalens

High-Efficiency Broadband Grating Couplers for Silicon Hybrid Plasmonic Waveguides

High-performance Full-Etched Fiber-to-chip Grating Couplers at 3.7-Micron Wavelength on Silicon

Subwavelength TE/TM Grating Coupler Based on Silicon-on-insulator

Dual-layer SiNx-on-SOI Grating Coupler As an Efficient Higher-Order Fiber Mode Multiplexer