Crystallization of BaTiO<sub>3</sub> Thin Films Prepared by Metalorganic Decomposition with Hydrothermal Treatment at 140°C

Zhiqiang Wei,Minoru Noda,Masanori Okuyama
DOI: https://doi.org/10.1557/proc-688-c7.26.1
2001-01-01
MRS Proceedings
Abstract:AbstractBaTiO3 (BTO) thin films with perovskite structure have been prepared on Pt/Ti/SiO2/Si substrates using a combined process of a conventional MOD (metal organic decomposition) process and a hydrothermal treatment. The BTO thin films with polycrystalline structure are grown on Pt/Ti/SiO2/Si substrates at a processing temperature of 140°C. The structural development, stoichiometry, spectroscopic, and dielectric properties of the BTO thin films have been systematically investigated. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. ICP (Inductively coupled plasma) and XPS (x-ray photoelectron spectroscopy) results show that stoichiometric BTO thin films were obtained.
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