Photoemission Study of Energy Band Alignment of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> and Common CMOS Materials

Lina Wei-Wei Fang,Ji-Sheng Pan,Andy Eu-Jin Lim,Rinus Tek-Po Lee,Minghua Li,Rong Zhao,Luping Shi,Tow-Chong Chong,Yee-Chia Yeo
DOI: https://doi.org/10.1557/proc-1072-g02-08
2008-01-01
MRS Proceedings
Abstract:We report the energy band alignment of Ge2Sb2Te5 and a variety of common complementary-metal-oxide-semiconductor (CMOS) compatible materials. These materials include silicon, silicon oxide, hafnium oxide, silicon nitride as well as nickel silicide. High-resolution X-ray photoelectron spectroscopy was employed as the main tool to obtain the core-level spectra, the valence band spectra, and the energy loss spectra. A precise determination of the valence band offsets of Ge2Sb2Te5 and the various materials were obtained. The conduction band offsets were then determined. The energy band line-ups of Ge2Sb2Te5 and these CMOS compatible materials were established.
What problem does this paper attempt to address?