Direct Determination of Energy Band Alignments of Ni/Al2O3/GaN MOS Structures Using Internal Photoemission Spectroscopy

Zeng Zhang,Christine M. Jackson,Aaron R. Arehart,Brian McSkimming,James S. Speck,Steven A. Ringel
DOI: https://doi.org/10.1007/s11664-013-2942-z
IF: 2.1
2013-01-01
Journal of Electronic Materials
Abstract:The energy band alignments of Ni/Al2O3/GaN heterostructures have been explored by internal photoemission (IPE) and capacitance–voltage (CV) measurements. By performing IPE measurements at both reverse- and forward-bias conditions, the Ni/Al2O3 Schottky barrier is found to be 2.9 ± 0.1 eV with the presence of a strong image force lowering effect, while the Al2O3/GaN conduction-band offset is determined to be 2.2 ± 0.1 eV and is insensitive to oxide electrical field. CV-based flat-band voltage analysis has further been performed on samples with different oxide thicknesses, not only confirming the IPE-measured band alignment but also revealing the presence of 3.0 × 1012 cm-2 net positive charge at the Al2O3/GaN interface.
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