Precipitation of Molybdenum Oxides in Supersaturated Zinc Oxide Thin Films

Yijia J Chen,Shen-how Zhu,Tien-Chai Lin
DOI: https://doi.org/10.1149/09704.0037ecst
2020-01-01
ECS Transactions
Abstract:Zinc oxide thin films saturated with molybdenum were prepared by RF magnetron sputtering process. A surprising finding about the study is the electrical conductivity increases and then decreases with molybdenum sputtering power. Hall measurement study shows that the conductivity decrease is caused by decreased electron concentration. However, the electron mobility increases steadily with increased molybdenum sputtering power in the same range even though the molybdenum incorporation still increases. This is an indication that the electrical conduction no longer occurs through the molybdenum-doped ZnO grains. We conclude that the conduction changes from grains to grain boundaries as molybdenum sputtering power increases. It means molybdenum is precipitated at the grain boundaries and forms conducting channels besides zinc oxide grains. The high mobility conduction channel might be desired for devices using electron transport layers in their structures.
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