Abstract:A parametrically excited mode-localized accelerometer is designed using the bifurcation phenomenon to improve the robustness of the fluctuation of the driving voltage and damping while maintaining high sensitivity. A dynamic multi-physics model was established while considering both mechanical and electrostatic nonlinearities. The equation was solved by method of multiple scales and verified by harmonic balanced method coupled with the asymptotic numerical method. Two types of bifurcation exist in amplitude frequency response, namely Saddle-Node bifurcation and Supercritical Hopf bifurcation. By introducing Saddle-Node bifurcation, the response amplitude and measurement range can be improved by 100% and 1000%, respectively, while the sensitivity of the amplitude ratio is about 2 orders of magnitude higher than that based on the frequency ratio. At the Supercritical Hopf bifurcation point, a small acceleration will change the topological structure from Supercritical Hopf to Saddle-Node bifurcation. The variation in the amplitude ratio of the Supercritical Hopf point with acceleration is similar to the sign function, which leads to an extremely high sensitivity of 10000%/g in a dynamic range of +/- 0.001 g. Moreover, the Supercritical Hopf bifurcation point is not affected by the amplitude of the excitation voltage and damping coefficient, which provides a new method for improving the sensing robustness. Ethical Compliance: All procedures performed in studies involving human participants were in accordance with the ethical standards of the institutional and/or national research committee and with the 1964 Helsinki Declaration and its later amendments or comparable ethical standards. Conflict of Interest declaration: The authors declare that they have NO affiliations with or involvement in any organization or entity with any financial interest in the subject matter or materials discussed in this manuscript.

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

A Low-Noise High-Order Mode-Localized MEMS Accelerometer

A MODE-LOCALIZED MEMS ACCELEROMETER IN THE MODAL OVERLAP REGIME EMPLOYING PARAMETRIC PUMP

A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

Acceleration Sensing Based on the Bifurcation Dynamics of Parametrically Excited Mode-Localized Resonators

Suppression on Nonlinearity of Mode-Localized Sensors Using Algebraic Summation of Amplitude Ratios As the Output Metric

Exploiting Nonlinearity to Enhance the Sensitivity of Mode-Localized Mass Sensor Based on Electrostatically Coupled MEMS Resonators

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

The Research Progress on Mode-localized Sensors

A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

Nonlinearity enhanced mode localization in two coupled MEMS resonators

On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

SELF-OSCILLATION FOR MODE LOCALIZED SENSORS

Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation

A Novel Dual-Mass Accelerometer Exploiting Mode Localization in Electrostatically Coupled Resonators

Mode-Localized Z-Axis Accelerometer

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

Resolution Limit of Mode-Localised Sensors

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation