Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

SELF-OSCILLATION FOR MODE LOCALIZED SENSORS

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

A Self-Sustained Mass Sensor with Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

A Low-Noise High-Order Mode-Localized MEMS Accelerometer

Resolution Limit of Mode-Localised Sensors

Suppression on Nonlinearity of Mode-Localized Sensors Using Algebraic Summation of Amplitude Ratios As the Output Metric

On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Characterization of forced localization of disordered weakly coupled micromechanical resonators

A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

Nonlinearity Modulation in a Mode-Localized Mass Sensor Based on Electrostatically Coupled Resonators under Primary and Superharmonic Resonances

A High-Sensitivity Micromechanical Electrometer Based on Mode Localization of Two Degree-of-Freedom Weakly Coupled Resonators

A Novel Resonant Accelerometer Based on Mode Localization of Weakly Coupled Resonators

Exploiting Nonlinearity to Enhance the Sensitivity of Mode-Localized Mass Sensor Based on Electrostatically Coupled MEMS Resonators

A MODE-LOCALIZED MEMS ACCELEROMETER IN THE MODAL OVERLAP REGIME EMPLOYING PARAMETRIC PUMP

Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback