Abstract:This article presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour extensional mode. It features a quality factor of similar to 4200 under atmospheric pressure at a resonance frequency of similar to 6.36 MHz. More than three orders of magnitude enhancement (similar to 1700 times) of the normalized mass sensitivity based on the amplitude ratio (AR) change were achieved compared to that based on the frequency shift. The mass resolution thereof was obtained as 1.2 pg (for the AR change output) and 0.727 pg (for the frequency shift output), respectively. Compared with the previously reported mass sensor based on coupled BAW resonators, the presented device achieved an enhanced performance in terms of both quality factor (similar to 2.37 times higher), stability (similar to 100 and similar to 3.5 times better for the AR change and frequency shift), and mass resolution (similar to 307 and similar to 2.97 times better for the AR change and frequency shift). Moreover, the stability of the 3-DoF system with the AR change output was enhanced since there was only a similar to 1.65-fold difference in the mass resolution in terms of the frequency shift and AR change, compared to similar to 170-fold in the previous study. Furthermore, the novel device operated with a Q-factor of similar to 305 in deionized (DI) water, demonstrating the considerable potential of such devices for future sensing applications in a liquid environment.

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