Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

Exploiting Nonlinearity to Enhance the Sensitivity of Mode-Localized Mass Sensor Based on Electrostatically Coupled MEMS Resonators

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

An asymmetric mode-localized mass sensor based on the electrostatic coupling of different structural modes with distributed electrodes

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization

Nonlinear enhanced mass sensor based on optomechanical system

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Single input-single output coupled resonators with nonlinear self-excitation for multiple mass sensing

Sensitivity Enhancement of Nonlinear Micromechanical Sensors Using Parametric Symmetry Breaking

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Nonlinear optical mass sensor with an optomechanical microresonator

The effect of a distributed mass loading on the frequency response of a MEMS mesh resonator

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization.

Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback

Mass Sensing Using Micromechanical Resonators Operating in Nonlinear Regime

Ultrasensitive nanomechanical mass sensor using hybrid opto-electromechanical systems.