Abstract:The detection of multiple traces is of paramount importance for facilitating chemical production, safeguarding public safety and health, and advancing scientific research, among other critical applications. Currently, a single trace can be accurately identified by MEMS resonant sensors, but quantitative detection of multiple traces still faces significant challenges, especially the increment of hardware and signal processing requirements due to multichannel output signal and complex resonator structure. Therefore, a single-input and single-output (SISO) sensing scheme for multiple traces is thus proposed in this work via high-order nonlinear mode localization. A coupled trio-cantilever array resonator actuated by nonlinear electrostatic force is designed for three traces detection. One side cantilever (No. 1) is actuated by the electrostatic electrode around the 4th to 6th modal frequencies of the resonator, and square and cubic nonlinearities are also imported to break the structural symmetry. The vibration energy of Cantilever No. 1 will transfer to No. 2 and No. 3 via the overhangs. By measuring the resonant frequency shifts of the 4th to 6th localized modes in No. 3 and decoupling the relationship between the resonant frequency shifts and the masses of the three traces introduced onto the surface of each cantilever, SISO identification and detection of the three traces can be realized. After multiple simulations and experimental validations, both theoretical and experimental results consistently demonstrate that this scheme achieves high sensitivity, high resolution, and SISO detection. Most of all, by theoretically decoupling the intricate relationship between the resonant frequency shifts and the three traces, the maximum relative sensing errors for the three traces are greatly reduced. The experimental results show that the maximum relative errors of the three cantilevers for measuring trace mass are = 13.11%, = 6.42%, and = 7.07%. This effort expands the theoretical framework of mode localization, providing a foundation for a novel quantitative approach to the detection of multiple traces.

Single input-single output coupled resonators with nonlinear self-excitation for multiple mass sensing

On a principle for mass sensing using self-excited template dynamics of coupled oscillators and root-finding algorithms

A Mass-Position Sensing Scheme Using a Geometrically Adjustable Resonator With Low-Order Modals for Detecting Multiple Analytes

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Internal resonance in coupled oscillators – Part I: A double amplification mass sensing scheme without Duffing nonlinearity

Double Mechanical Frequencies Locking Phenomenon in a Piezoelectric Driven 3-DOF Magnetic Coupling Resonator

Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

Nonlinear optical mass sensor with an optomechanical microresonator

Nonlinear enhanced mass sensor based on optomechanical system

Internal resonance in coupled oscillators – Part II: A synchronous sensing scheme for both mass perturbation and driving force with duffing nonlinearity

Autoparametric Internal Resonance in Coupled Oscillator: An Excitation Amplitude Insensitive Mass Sensing Scheme With a Roof Tilting

Sensitivity of mass sensors enhanced by higher-order exceptional points in an optomechanical system

Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors

An asymmetric mode-localized mass sensor based on the electrostatic coupling of different structural modes with distributed electrodes

The effect of a distributed mass loading on the frequency response of a MEMS mesh resonator

Frequency Superposition of Coupled Modes via Autoparametric Vibration for Ultra-Sensitive Mass Detection

Single-Input and Single-Output Detection of Multiple Trace Substances via High-Order Nonlinear Mode Localization

Ultrasensitive Mass Sensor Using the Out-of-phase Vibration Eigenstate of Intercoupled Dual-Microcantilevers

A Mass Sensing Technology Based on a Dynamic Microcantilever in Liquid

Net-overhang Coupled Microcantilevers for Sensitive Mass Detection

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation