Ultrasensitive Mass Sensor Using the Out-of-phase Vibration Eigenstate of Intercoupled Dual-Microcantilevers

Wang, J.,Feng, B.,Li, C.,Zhang, F.Q.
DOI: https://doi.org/10.1109/transducers.2011.5969204
2011-01-01
Abstract:This paper reports a kind of intercoupled silicon dual-microcantilevers for ultrasensitive mass detection based on the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the dual-cantilevers. The structural intercoupling of the dual-cantilevers arises from the coupling overhang connecting them at the base. The whole structure operation is excited by a piezoactuator under ambient conditions. Experimental results indicate that the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the structure is linear as a function of added mass, and it is more than one order of magnitude greater than the relative change in resonance frequency of in-phase vibration eigenstate.
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