A Mass Sensing Technology Based on a Dynamic Microcantilever in Liquid

FANG Xuan,LI Yan-ning,DING Li-li,SHI Xiao-jie,FU Xing,HU Xiao-tang

DOI: https://doi.org/10.3969/j.issn.1004-2474.2008.03.039

2008-01-01

Abstract:When a resonating microcantilever operates in liquid,owing to the heavy hydrodynamic damping on the microcantilever,the resonant frequency shift is insensitive to effective mass′ increment,which leads to a very low detection sensitivity.In order to solve this problem,we have developed a new method that is based on a theory that for the same mass' increment,the resonant frequency shift is more when a microcantilever is actuated at a higher harmonic.Using an atomic force microscopy as the experiment platform and CrO2-4 ions as the measured object,and a microcantilever with a sensitive layer as a transducer,we detected higher harmonics' frequency shift of the microcantilever owing CrO2-4 ions adsorbed on the sensitive layer.The result shows a mass' increment of 0.82 ng can be measured by this method.