Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization

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Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

A Stiffness-Tunable MEMS Accelerometer

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

A MEMS Resonant Accelerometer with Sensitivity Enhancement and Adjustment Mechanisms

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

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Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

Design Of A High-Sensitivity Micromechanical Resonant Accelerometer With A Two-Stage Microlever

Mode-Localized Z-Axis Accelerometer

A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization.

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Structural Design and Testing of a Micromechanical Resonant Accelerometer

A MEMS Resonant Accelerometer with High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation